A Novel Device for Functional Evaluation of Gas Sensing Layers

Abstract

Chemical gas sensors are operated at elevated temperatures and the actual temperature has a tremendous influence on sensitivity and selectivity. From that perspective, precise temperature control over the chip is an absolute requirement. Next to a stable heating system, a controlled gas flow in the test box is required. The test gases should not cool down the sensor surface too much and not be heated up by the heater. To make the material integration easy and reduce the costs for sensor platforms, often rather large sensor devices are fabricated. We demonstrate that a combined approach of thermal analysis and computational fluid dynamics enables the co-design of gas flow path and heater to archive precise temperature conditions at the sensor material and in the surrounding test gas atmosphere.