A novel external electrode configuration for the electrostatic actuation of MEMS based devices

Rosa, Michel A.; Bruyker, Dirk De; Völkel, A. R.; Peeters, Eric; Dunec, John

doi:10.1088/0960-1317/14/4/003

Cited by 58 publications

(44 citation statements)

References 15 publications

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“…One key to open the door to novel DEA structures is the use of electrostatic zipping, which is a well-known actuation method for silicon Micro Electro-Mechanical Systems (MEMS) [7] . Unlike "squeezing-mode" DEAs where the elastomer membrane is compressed by the electric field between two compliant electrodes, a soft electrode is attracted toward a fixed one.…”

Section: Dielectric Elastomer Actuators (Deas) For Microfluidicsmentioning

confidence: 99%

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et al. 2012

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We report on the use of zipping actuation applied to dielectric elastomer actuators to microfabricate mm-sized pumps. The zipping actuators presented here use electrostatic attraction to deform an elastomeric membrane by pulling it into contact with a rigid counter electrode. We present several actuation schemes using either conventional DEA actuation, zipping, or a combination of both in order to realize microfluidic devices. A zipping design in which the electric field is applied across the elastomer membrane was explored theoretically and experimentally. Single zipping chambers and a micropump body made of a three chambers connected by an embedded channel were wet-etched into a silicon wafer and subsequently covered by a gold-implanted silicone membrane. We measured static deflections of up to on chambers with square openings of 1.8 and 2.6 mm side, in very good agreement with our model.

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Section: Dielectric Elastomer Actuators (Deas) For Microfluidicsmentioning

confidence: 99%

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et al. 2012

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“…3) with a voltage-controlled actuation. This approach is the most popular in the literature [5,6,12,25,26].…”

Section: Nonlinear Actuator Mems Modelmentioning

confidence: 99%

Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators

Fargas-Marques

Costa‐Castelló

2017

Nonlinear Dyn

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Electrostatic parallel-plate actuators are a common way of actuating microelectromechanical systems, both statically and dynamically. Nevertheless, actuation voltages and oscillations are limited by the nonlinearity of the actuator that leads to the Pull-in phenomena. This work presents a new approach to obtain the electrostatic parallel-plate actuation voltage, which allows to freely select the desired frequency and amplitude of oscillation. Harmonic Balance analysis is used to determine the needed actuation voltage and to choose the most energy efficient actuation frequency. Moreover, a new two-sided actuation approach is presented that allows to actuate the device in all the stable range using the Harmonic Balance Voltage.

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“…However, this leads to significantly elevated driving voltage, since the electrostatic force is proportional to the square of the separation distance. Various researches have been carried out [2][3][4][5][6][7] to overcome the drawback. Shai Shmulevich et al [2] proposed a design with a nonlinear spring whose spring constant increases as the actuator closes, and an 18.6 µm out of 21 µm was achieved; Holger Conrad et al [3] came up with a v-shaped actuator design so that the displacement is amplified by angle between the pulling direction and actuation direction.…”

Section: Introductionmentioning

confidence: 99%

“…Shai Shmulevich et al [2] proposed a design with a nonlinear spring whose spring constant increases as the actuator closes, and an 18.6 µm out of 21 µm was achieved; Holger Conrad et al [3] came up with a v-shaped actuator design so that the displacement is amplified by angle between the pulling direction and actuation direction. Other methods also exist such as nonlinear driver electrodes [4] and bi-directional moving of the upper electrode [5,6]. In [7], a capacitor in series with the electrode power supply was explored to avoid pull-in.…”

Section: Introductionmentioning

confidence: 99%

Reduction of Electrostatic Control Voltage with a Tri-Electrode Actuator

Zhou

Shafai

2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force on the MEMS device, while the higher voltage on the drive electrode remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode's modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke.

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A novel external electrode configuration for the electrostatic actuation of MEMS based devices

Cited by 58 publications

References 15 publications

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Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators

Reduction of Electrostatic Control Voltage with a Tri-Electrode Actuator

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