A novel fabrication method of capillary tubes on quartz for chemical analysis applications

Self-sealed circular channels for micro-fluidics

“…The channel's dimensional specifications vary from <100 nm to couple of micrometers for diameter and few to hundreds of micrometers for length. A wide range of techniques are being employed for the fabrication of micro or nano-channels using materials like silicon, quartz, polymers, metals and plastics [4][5][6][7][8][9][10][11] but they are either limited by the channel dimensions that they can realize or the complexity of the process.…”

“…ond wafer or by depositing a film. Kaplan et al [4] have used quartz substrate and wet isotropic etching process to create channels, 10-100 m width, which are capped by oxidation of masking poly-silicon layer followed by LPCVD based silicon oxide deposition. Tjerkstra et al [5] used combination of wet and dry anisotropic and isotropic etching processes to create channels in silicon substrates followed by LPCVD silicon nitride and silicon oxide sealing or glass wafer bonding.…”

A Fluorescence Detection and Selection Device for Dna-Molecules Bound to Microspheres

“…The branches within the system makes it possible to mix solutions coming from different cups, and to switch the flow into different branches for sorting purposes. VLSItechnology is used to fabricate the microstructures out of a quartz substrate (IMCaps), thus giving it micrometer precision [4,5].…”

A versatile surface channel concept for microfluidic applications

“…Furthermore, fluidic interfacing is difficult introducing dead-volumes. These limitations can be overcome by making channels directly below the substrate surface [5][6][7][8].…”