A Novel Flexure Piezomotor With Minimized Backward and Nonlinear Motion Effect

He, Sifeng; Tang, Hui; Zhu, Zhongyuan; Zhang, Peiyuan; Xu, Ying; Chen, Xin

doi:10.1109/tie.2020.3048320

Cited by 13 publications

(7 citation statements)

References 26 publications

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“…where the R(z) represents the desired trajectories. According to (24), once the harmonics component reaches the cutoff frequency of Q(z) , the state-steady error tends to be E s (z) ≈ R(z) − W(z), which means the error does not enter the learning control. Thus, a sufficiently high cutoff frequency should be selected when the error can be converged.…”

Section: Controller Designmentioning

confidence: 99%

“…Additionally, the stroke, working frequency range, and the tracking accuracy of the proposed compliant mechanism are ≥100 µm, ≥30 Hz and ±2 µm, respectively [20,21]. The compliant mechanism has the advantages of high precision, low winding, and no friction, and can achieve ultra-high-precision and high-frequency motion within a small range [22][23][24]. Moreover, it has been demonstrated that it is effective for implementing mini-LED precision positioning by utilizing a 2-DOF-compliant mechanism [25][26][27].…”

Section: Introductionmentioning

confidence: 96%

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A Novel Compliant 2-DOF Ejector Pin Mechanism for the Mass Transfer of Robotic Mini-LED Chips

Huang

Lin

et al. 2022

Applied Sciences

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The continuous development of mini-LEDs has led to higher requirements for chip transfer technology, which makes it difficult for the intermittent transfer method with a mechanical ejector pin to meet these requirements. To solve this problem, a novel compliant 2-DOF ejector pin mechanism for the mass transfer of robotic mini-LED chips is proposed in this paper. The compliance matrix method and the Newton method are employed for system kinematic modeling and dynamics modeling, respectively. The static and dynamic analyses of the mechanism are carried out via ANSYS Workbench, and the results of FEA are demonstrated the effectiveness of theoretical calculation. Then, an ILC is utilized to control the device via a parameters regulation approach in the frequency domain. Finally, an open-loop test and a trajectory tracking test for the prototype are carried out verify the effectiveness of proposed device. The test results indicate that the working stroke of the mechanism reaches 120 μm, the natural frequency of the device is 250.85 Hz, the coupling rate is less than ±0.5% and the tracking errors of 10 Hz, 20 Hz and 30 Hz sinusoidal signals are all within ±1.5%. According to the results of theoretical analyses, FEA and test, it has been proved that the designed mechanism for the mass transfer of mini-LED chips is superiority and effective.

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Section: Controller Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 96%

A Novel Compliant 2-DOF Ejector Pin Mechanism for the Mass Transfer of Robotic Mini-LED Chips

Huang

Lin

et al. 2022

Applied Sciences

Self Cite

View full text Add to dashboard Cite

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“…Most of the inchworm actuators mentioned above utilize typical designs that consisting of two clamping mechanisms and one driving mechanism, each part including one or more PZTs. Multi PZTs (three or more) lead to complex structures and electronic systems and make it difficult to assemble, control, and integrate [25]. Reducing the number of PZTs can alleviate these problems and has attracted some research [26][27][28][29].…”

Section: Introductionmentioning

confidence: 99%

A novel high-speed bi-directional piezoelectric inchworm actuator based on flexible supported baffles

Sun

Yan

2022

Smart Mater. Struct.

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Typical bionic piezoelectric inchworm actuators utilize at least two clamping PZTs and one driving PZT to achieve bi-directional actuation, resulting in complex structures, complicated electronic systems, and high cost. Actuators with lesser PZTs (1 or 2) can eﬀectively alleviate these problems; however, existing designs are limited to unidirectional or bidirectional low-speed motion. This study proposes a high-speed bi-directional inchworm actuator with two PZTs, where the clamping switching is achieved by only one PZT through innovative use of ﬂexible supported baﬄes and enhanced clamping mechanisms. The design also reduces the six sub-steps of the driving principle (alternate elongation and shortening of three PZTs) required for each step of typical designs to four, thus eﬀectively increasing the maximum speed of the actuation. Experimental results show that the proposed design facilitates bi-directional motions in a stable manner with a maximum speed of 5.1 mm/s, which is approximately 23 times faster than the existing design with two PZTs. The proposed design can eﬀectively expand the application range of dual-piezoelectric inchworm actuators and can ﬁnd a promising application in the ﬁeld of high-speed precision positioning.

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“…The compliant mechanism has the advantage of no gap and friction, no lubrication and assembly, and integrated design and processing [20][21][22]. It has been utilized in a wide range of applications, such as micro-electromechanical systems, scanning probe microscopes, ultra-precision machining, and biological cell operations [23][24][25].…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a Compliant End-Effector for Robotic Polishing Using Flexible Beams

Qin

et al. 2022

Actuators

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The contact force between the polishing tool and the workpiece is crucial in determining the surface quality in robotic polishing. Different from rigid end-effectors, this paper presents a novel compliant end-effector (CEE) for robotic polishing using flexible beams. The flexibility of the CEE helps to suppress the excessive displacement caused by the inertia of the polishing robot and avoids damaging the polishing tool and workpiece surface. In addition, the contact force can also be precisely estimated via the measurement of the CEE’s displacement using a capacitive position sensor. The design, modeling and experimental validation of the CEE are presented. Firstly, the analytical model of the CEE is established using the stiffness matrix method. Subsequently, the analytical model is verified by finite element analysis. Further, a prototype is manufactured, and its characteristics and performance are experimentally tested. The equivalent stiffness is measured to be 0.335 N/μm, and the first natural frequency along its working direction is 42.1 Hz. Finally, the contact force measurement using the CEE is compared with a force sensor. Under open-loop condition, the resolution of the contact force measurement is found to be 0.025 N, which makes the fine tuning of the contact force possible in robotic polishing.

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A Novel Flexure Piezomotor With Minimized Backward and Nonlinear Motion Effect

Cited by 13 publications

References 26 publications

A Novel Compliant 2-DOF Ejector Pin Mechanism for the Mass Transfer of Robotic Mini-LED Chips

A Novel Compliant 2-DOF Ejector Pin Mechanism for the Mass Transfer of Robotic Mini-LED Chips

A novel high-speed bi-directional piezoelectric inchworm actuator based on flexible supported baffles

Design and Analysis of a Compliant End-Effector for Robotic Polishing Using Flexible Beams

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