Abstract:Abstract-In order to overcome the problems facing Cr-Cu-Au metallization, such as discoloration, diffusion of Cu into Au, a four-layer metallization Cr-Cu-NiP-Au is demonstrated on alumina substrate for microwave integrated circuit (MICs). A amorphous and nonmagnetic NiP barrier layer is used to avoid the diffusion of Cu into Au through the grain boundaries, which are the low activation energy path for diffusion at moderate temperature.In this view, properties of Cr-Cu-NiP-Au metallization, such as sheet resis… Show more
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