A novel graphene pressure sensor with zig–zag shaped piezoresistors for maximum strain coverage for enhancing the sensitivity of the pressure sensor

Abstract

The demand for flexible and wearable sensors is increasing day by day due to varied applications in the biomedical field. Especially highly sensitive sensors are required for the detection of the low signal from the body. It is important to develop a pressure sensor that can convert the maximum input signal into the electrical output. In this paper, the design and performance of graphene piezoresistive pressure sensors have been investigated by zig–zag piezoresistors on the square diaphragm. On the applied pressure, deformation is sensed by the piezoresistors above the diaphragm. Finite element analysis is carried out to investigate the effect of zig–zag piezoresistors on the square diaphragm. Simulated results for the optimized design are obtained for an operating range of 0–100 psi for pressure sensitivity.

Sensitivity of Piezoresistive Pressure Sensors to Acceleration

“…It is worth noticing that more and more sophisticated materials are used in the production process of pressure transducers. In [4], the authors presented results of the research on piezoresistive graphene sensors with a special zigzag structure. In the article, the mentioned structure was tested on a square membrane using the finite element method with the help of the COMSOL Multiphysics tool (COMSOL, Inc., 100 District Avenue Burlington, MA 01803, USA).…”

“…It is a new trend of electronics in medicine and invasive surgery. One of the examples is in [4], where the authors presented some results of the research on piezoresistive graphene sensors with a special zigzag structure. The authors emphasized the possibility of using this type of structure, e.g., in veterinary medicine to detect blood vessel obstruction in selected animal species and in postoperative measurements to monitor the patient's condition.…”

Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment

“…For a particular set of range variation are almost very less, so considering a noticeable change in deflection, three levels such as 20 mm, 40 mm and 60 mm is taken for optimization of best combination of diaphragm thickness to reduce the non-linearity and enhancing the sensitivity of the pressure sensor. Minimum the thickness of diaphragm more the deflection [24]. However, the effect of thickness is also analysed with interaction with other input factors.…”

Laser-Induced Graphene Pressure Sensors Manufactured via Inkjet PCB Printer

“…Several LIG strain gauges have been reported with exceptional sensitivity [1,2,4]-some even approaching an order of magnitude greater than those of metal foil sensors (MFSs) [3]. Although some have been simulated [5], no PE fabricated LIG diaphragm gauge pressure sensors have been experimentally demonstrated or characterized. Our group has previously demonstrated chemical vapor deposition (CVD) graphene-based sensors and actuators, with high piezoresistive gauge-factor response and large mechanical actuation, leading us to use graphene-based sensors in our current device [6,7].…”