2018
DOI: 10.3390/mi9030121
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A Novel High-Precision Digital Tunneling Magnetic Resistance-Type Sensor for the Nanosatellites’ Space Application

Abstract: Micro-electromechanical system (MEMS) magnetic sensors are widely used in the nanosatellites field. We proposed a novel high-precision miniaturized three-axis digital tunneling magnetic resistance-type (TMR) sensor. The design of the three-axis digital magnetic sensor includes a low-noise sensitive element and high-performance interface circuit. The TMR sensor element can achieve a background noise of 150 pT/Hz1/2 by the vertical modulation film at a modulation frequency of 5 kHz. The interface circuit is main… Show more

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Cited by 23 publications
(10 citation statements)
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“…In the chopping technique, chopper switches are designed for the output of MR sensors [330]. The noise characteristics of the chopper switches are dependent on charge leakage, parasitic capacitance, IC substrate coupling noise, voltage stability of the drive signal, and the external electric field sensitive electrodes [331]. All these factors need to be considered and optimized in order to suppress the noise.…”
Section: B Detectivitymentioning
confidence: 99%
“…In the chopping technique, chopper switches are designed for the output of MR sensors [330]. The noise characteristics of the chopper switches are dependent on charge leakage, parasitic capacitance, IC substrate coupling noise, voltage stability of the drive signal, and the external electric field sensitive electrodes [331]. All these factors need to be considered and optimized in order to suppress the noise.…”
Section: B Detectivitymentioning
confidence: 99%
“…Harmonic distortion and noise are the key parameters which determine the performance of TMR sensors. The tunneling magneto-resistance micro-magnetometers can achieve a high-precision output (less than 1 nT/Hz 1/2 ) by input-stage chopping and ripple suppression loop [6,7]. We proposed some optimization methods of harmonic distortion for high-precision miniaturized three-channel TMR sensors interface circuit.…”
Section: Of 16mentioning
confidence: 99%
“…The MMS array was applied in bio-detection assays. A three-axis MEMS MMS, fabricated by Li [4], was a digital tunneling magnetoresistance type. The MMS with a CMOS interface circuit has been used in the field of nanosatellites.…”
Section: Introductionmentioning
confidence: 99%