A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics

Zhu, Weijie; Zhu, Zhiwei; Guo, Ping; Ju, Bing Feng

doi:10.1016/j.ymssp.2017.07.010

Cited by 134 publications

(64 citation statements)

References 23 publications

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“…6.1 Lagrange-Based Methods. Over the past three decades, Lagrange-based dynamic modeling approaches have been developed for compliant mechanisms [113][114][115][116][117][118][119][120][121][122][123][124][125][126][127][128][129][130]. Generally speaking, the reported approaches can be roughly classified into three categories, as shown in Fig.…”

Section: Dynamic Modeling Of Compliant Mechanismsmentioning

confidence: 99%

“…6.1.2 Lumped-Parameter Dynamic Model. A popular and elegant methodology for the dynamic modeling of small-deflection compliant mechanisms is the so-called lumped-parameter dynamic model with the input or output motion DOFs as the variables [119][120][121][122][123]. Indeed, the analytical formula of fundamental frequency can be obtained with this method.…”

Section: Dynamic Modeling Of Compliant Mechanismsmentioning

confidence: 99%

“…Two books in the field of compliant mechanisms [1,97] mainly involve the kinetostatic issue. To sum up, the previous dynamic modeling of compliant mechanisms was mainly based on Lagrange's method [113][114][115][116][117][118][119][120][121][122][123][124][125][126][127][128][129][130]. In recent years, some newly dynamic modeling approaches, such as the pseudorigid-body model with mass factors [108] and the dynamic stiffness modeling method based on d'Alembert's principle [18,131,132], were developed for the dynamic analysis of compliant mechanisms.…”

Section: Introductionmentioning

confidence: 99%

“…For example, a PRBM-based dynamic model was built for parallelguided compliant mechanisms [114] based on Lagrange's equation and the dynamic equivalence. In the second category, the equivalent input/output stiffness of compliant mechanisms is first modeled by using a variety of kinetostatic methods, the dynamic model can be then formulated by calculating elastic and kinetic energies based on Lagrange's equation with motion degrees-offreedom (DOFs) as the variables, all these solutions can be classified as a lumped-parameter dynamic model [119][120][121][122][123]. The third category is termed the distributed-parameter model with finite number of DOFs [124][125][126][127][128][129][130][131][132], in which compliant mechanisms are usually discretized into several submembers and the dynamic model is established by calculating total elastic and kinetic energies.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Ling

Howell

Cao

et al. 2020

Applied Mechanics Reviews

163

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Flexure-based compliant mechanisms are becoming increasingly promising in precision engineering, robotics, and other applications due to the excellent advantages of no friction, no backlash, no wear, and minimal requirement of assembly. Because compliant mechanisms have inherent coupling of kinematic-mechanical behaviors with large deflections and/or complex serial-parallel configurations, the kinetostatic and dynamic analyses are challenging in comparison to their rigid-body counterparts. To address these challenges, a variety of techniques have been reported in a growing stream of publications. This paper surveys and compares the conceptual ideas, key advances, and applicable scopes, and open problems of the state-of-the-art kinetostatic and dynamic modeling methods for compliant mechanisms in terms of small and large deflections. Future challenges are discussed and new opportunities for extended study are highlighted as well. The presented review provides a guide on how to select suitable modeling approaches for those engaged in the field of compliant mechanisms.

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Section: Dynamic Modeling Of Compliant Mechanismsmentioning

confidence: 99%

Section: Dynamic Modeling Of Compliant Mechanismsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Ling

Howell

Cao

et al. 2020

Applied Mechanics Reviews

163

View full text Add to dashboard Cite

show abstract

“…LEM's functions are similar those of CMs which transfer force, motion, and energy [1][2][3][4][5][6]. CMs can be manufactured by the 3D printing technique, wire discharged machining process, or CNC machine from a solid [7,8]. Unlike CMs, LEM is fabricated from a sheet material with plastic or metal lamina material [9].…”

Section: Introductionmentioning

confidence: 99%

Design and Performance Analysis of a TLET‐Type Flexure Hinge

Chau

Tran

Dao

2020

Advances in Materials Science and Engineering

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In order to permit a large deflection, three lamina emergent torsional flexure hinges are reconfigured to create a new triple LET-type flexure hinge (TLET) in this paper. The TLET consists of flexure hinges in a series coupled with others in parallel configuration. This arrangement is aimed to enhance the displacement of the joint. The proposed joint is capable of generating a large displacement and a large capacity of load within safety working conditions. The closed-form models are derived to calculate the equivalent spring constant, rotation angle, and displacement of the proposed joint. Failure analysis of the TLET joint with different materials is conducted by finite element analysis. The closed-form models are validated by simulations and experimentations. The validated results are well coincided each other. The result found that the joint achieves a maximum large displacement of 16.97 mm in the x-axis with respect to a maximum load of 20 N. When the joint slides a maximum displacement of 16.97 mm along the x-axis, the output displacement emerges out the z-axis up to 23.12 mm, respectively. The joint can achieve an angle displacement of 38.92°. The displacement of the TLET joint is 2.4 times greater than that of the traditional LET joint. The proposed joint is considered for engineering applications where a large working stroke and a large capacity of load are expected.

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Periodic tracking for piezo‐actuated displacement stage based on disturbance rejection proportional integral derivative and repetitive control

Nie

Zhang

et al. 2021

Adv Control Appl

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Piezo-actuated displacement stage is often used to perform periodic scanning tasks, but the conventional control schemes may not satisfactorily track periodic reference signals. Our solution is a disturbance rejection proportional-integral-derivative (DR-PID)-based repetitive control (RC) scheme in which the hysteresis nonlinearity with the same period of reference input can be well suppressed by RC law. Stability criterions for the closed-loop system are developed based on small-gain theorem. A simple and effective design algorithm is obtained based on the stability conditions, such that DR-PID and RC can be designed separately. Finally, the validation and superiority of the proposed method are demonstrated by simulation studies.

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A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics

Cited by 134 publications

References 23 publications

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

Design and Performance Analysis of a TLET‐Type Flexure Hinge

Periodic tracking for piezo‐actuated displacement stage based on disturbance rejection proportional integral derivative and repetitive control

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