A Novel MEMS Parallel-beam Acceleration Switch

Zhao, Jian; Jia, Jianyuan; Chen, Guangyan

doi:10.1109/mesa.2006.296987

Cited by 15 publications

(15 citation statements)

References 12 publications

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“…High reliability, high performance and low costs are very important for acceleration threshold switches which can be widely used in airbags, transportation systems and crash recorders [1][2][3]. Microelectromechanical systems (MEMS) technology makes it possible to realize low-cost acceleration switches with small size.…”

Section: Introductionmentioning

confidence: 99%

“…Microelectromechanical systems (MEMS) technology makes it possible to realize low-cost acceleration switches with small size. Many different MEMS acceleration switches have been reported [1][2][3][4][5][6][7][8][9]. Pull-in or snap through behavior of electrostatic force can be used to realize the needed acceleration thresholds [4].…”

Section: Introductionmentioning

confidence: 99%

“…However, it not only has caused failures of MEMS devices frequently but also has a risk of mis-operation by an electromagnetic noise [7,8]. Mechanical threshold acceleration switches are immune to outside disturbances such as electromagnetic noises and shocks of short duration [2,3,8]. Bistable beams are commonly used as latching mechanism but increase the design complexity [3,9].…”

Section: Introductionmentioning

confidence: 99%

“…Mechanical threshold acceleration switches are immune to outside disturbances such as electromagnetic noises and shocks of short duration [2,3,8]. Bistable beams are commonly used as latching mechanism but increase the design complexity [3,9]. A mechanically latching switch has been reported [2].…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Design, fabrication and characterization of a latching acceleration switch with multi-contacts independent to the proof-mass

Guo

Yang

Lin

et al. 2011

Sensors and Actuators A: Physical

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Design, fabrication and characterization of a latching acceleration switch with multi-contacts independent to the proof-mass

Guo

Yang

Lin

et al. 2011

Sensors and Actuators A: Physical

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“…Fabrication technology and the material used mainly determine the costs while latching mechanism and the contact pairs are of the two key elements that affect the performance and the reliability of a switch. Microelectromechanical systems (MEMS) technology makes it possible to realize low-cost acceleration switches with small size; many different acceleration MEMS switches have been reported [1][2][3][4][5][6][7]. Pull-in or snap through behavior of electrostatic force can be used to realize the needed acceleration thresholds [4].…”

Section: Introductionmentioning

confidence: 99%

A latching acceleration switch with cylindrical contacts independent to the proof-mass

et al. 2009

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A latching acceleration switch with cylindrical contacts is presented in this paper. The cylindrical contacts can make the switch immune to the fabrication imperfection and off sensitive axis shocks, as well as decrease the contact resistance. Moreover, all the contacts and their beams are separated from the proofmass so as to prevent the contacts from the impact resulting from the rebound or vibration of the proof mass once the switch is latched. The switch was fabricated by low-cost process and tested. The measured latching shock is 4500G and the response time is less than 0.1ms. The total on-resistance is less than 3 ohms while the insulation resistance is more than 200M ohms and the maximum allowable current is up to 130mA.

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