This paper presents a miniaturized W-band bandpass filter based on rectangular micro-coaxial structure. The filter with third-order Chebyshev response is analyzed and designed. It uses half-wavelength resonators and realizes the coupling between resonant units by adding grounded cylinders. The center frequency is 97.5 GHz with 3-dB fractional bandwidth (FBW) of 7.5%. Moreover, the prototype is fabricated by the surface micromachining technology, which greatly reduces its volume. The measured results are close to the simulations in operating band and the minimum insertion loss is 1.9 dB.