A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging

Abstract

Placid. (2015) A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging. Review of Scientific Instruments, 86 (4). 045106. Permanent WRAP url: http://wrap.warwick.ac.uk/76447 Copyright and reuse:The Warwick Research Archive Portal (WRAP) makes this work by researchers of the University of Warwick available open access under the following conditions. Copyright © and all moral rights to the version of the paper presented here belong to the individual author(s) and/or other copyright owners. To the extent reasonable and practicable the material made available in WRAP has been checked for eligibility before being made available.Copies of full items can be used for personal research or study, educational, or not-for profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. Publisher's statement:Copyright ( A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP url' above for details on accessing the published version and note that access may require a subscription.A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging A novel monolithic piezoelectric actuated wire clamp is presented in this paper to achieve fast, accurate and robust microelectronic device packaging. The wire clamp has compact flexure-based mechanical structure and light weight. To obtain large and robust jaw displacements and ensure parallel jaw grasping, a two-stage amplification composed of a homothetic bridge type mechanism and parallelogram leverage mechanism was designed. Pseudo-rigid-body model (PRBM) and Lagrange approaches were employed to conduct the kinematic, static and dynamic modeling of the wire clamp, and optimization design was carried out. The displacement amplification ratio, maximum allowable stress and natural frequency were calculated. Finite element analysis (FEA) was conducted to evaluate the characteristics of the wire clamp and wire Electro Discharge Machining (EDM) technique was utilized to fabricate the monolithic structure. Experimental tests were carried out to investigate the performance, and the experimental results match well with the theoretical calculation and FEA.The amplification ratio of the clamp is 20.96, and the working mode frequency is 895 Hz.Step response test show the wire clamp has fast response and high accuracy, and the motion resolution is 0.2μm. High speed precision grasping operations of gold and copper wires were realized using the wire clamper.

Design, modeling and test of a novel compliant orthogonal displacement amplification mechanism for the compact micro-grasping system

“…The requirement for the bidirectional symmetric input forces/displacements limits the scope of bridge-type mechanism, because in the field of micromanipulation, most of the actuators with one-dimensional output direction can only supply unidirectional movement under a certain driving condition, such as lateral comb electrostatic actuator (Bazaz et al 2011), arrays of electrostatic actuators (Bohringer et al 1996;Millet et al 2003), and chevron electrothermal actuator. Furthermore, for piezoelectric stack actuator, it is more convenient and stable for preload when fixed at one end, in which the symmetric bidirectional movement is transformed into the unidirectional movement as well (Sun et al 2014;Liang et al 2015). Therefore, unidirectional movement is typical for the actuators with one-dimensional output direction.…”

Design and Control of a Piezoelectric-Driven Microgripper Perceiving Displacement and Gripping Force

“…With the rapid development of micro-electromechanical systems (MEMS), microassembly and micromanipulation as the key technologies have become a hot research topic at home and abroad gradually [1]. The microgripper is an end effector for precision micromanipulation systems [2][3][4], the performance of which will affect the quality and accuracy of micro-operation process directly [5,6]. Therefore, it is of great practical significance to research on efficient and reliable microgripper.…”

Modeling and Identification of Piezoelectric-Actuated Stages Cascading Hysteresis Nonlinearity With Linear Dynamics

“…Among them, the piezoelectric actuators are more popular in nanopositioning applications due to their advantages of subnanometer resolution, high bandwidth and large mechanical force. Nowadays, piezoelectric-actuated stages have been applied in a wide range of nanopositioning equipment such as nanomanipulators [5], [8], [9] and scanning probe microscopy [6], [10]- [12]. However, the inherent hysteresis nonlinearity and lightly damped dynamics in the piezoelectric-actuated stages usually deteriorate the system performance and make a major challenge for achieving the high-performance nanopositioning control [5], [11], [13].…”