A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning

Dong, Jingyan; Yao, Qing; Ferreira, Placid M.

doi:10.1016/j.precisioneng.2007.03.002

Cited by 31 publications

(21 citation statements)

References 3 publications

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“…the number of actuation is the same as the number of DOF [17,114,[161][162][163][164][165][166][167], and over-actuated systems, i.e. the number of actuation is the more than the number of DOF [20,112].…”

Section: Modeling and Control Ofmentioning

confidence: 99%

“…Since most of such mechanisms use flexure hinges instead of conventional hinges to avoid friction and backlash [17,114,158,[159][160][161][162][163][164][165][166], the modeling of the flexure hinges becomes an important part in modeling such mechanisms [114,160,166]. Two kinds of workflows can be adopted for modeling the multi-DOF PEA-driven positioning systems.…”

Section: Modeling and Control Ofmentioning

confidence: 99%

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A Survey of Modeling and Control of Piezoelectric Actuators

Peng¹,

Xiongbiao²

2013

MME

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Piezoelectric actuators (PEAs) have been widely used in micro-and nanopositioning applications due to their fine resolution, fast responses, and large actuating forces. However, the existence of nonlinearities such as hysteresis makes modeling and control of PEAs challenging. This paper reviews the recent achievements in modeling and control of piezoelectric actuators. Specifically, various methods for modeling linear and nonlinear behaviors of PEAs, including vibration dynamics, hysteresis, and creep, are examined; and the issues involved are identified. In the control of PEAs as applied to positioning, a review of various control schemes of both model-based and non-model-based is presented along with their limitations. The challenges associated with the control problem are also discussed. This paper is concluded with the emerging issues identified in modeling and control of PEAs for future research.

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Section: Modeling and Control Ofmentioning

confidence: 99%

Section: Modeling and Control Ofmentioning

confidence: 99%

A Survey of Modeling and Control of Piezoelectric Actuators

Peng¹,

Xiongbiao²

2013

MME

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“…Such nanopositioning modules can be easily configured as building blocks to build a multi-degree-of-freedom nanopositioner. Parallelogram mechanisms have also been used in many other applications, such as delta-robots [10] and other low degree-of-freedom parallel kinematics nanopositioning stages [11][12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Design of high-bandwidth high-precision flexure-based nanopositioning modules

Polit

Dong

2009

Journal of Manufacturing Systems

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“…However, the accuracy of the SMA actuated systems is limited due to the high hysteretic behavior of SMA actuators [13]. PZT actuators have been widely used in micro/nano positioning system due to their advantages of large pushing force, nanometer-scale motion resolution and fast response [14]- [17]. Yao et al proposed a novel PZT actuated parallel-kinematic mechanisms for integrated, multi-axis nanopositioning [18].…”

Section: Introductionmentioning

confidence: 99%

A Flexure-Based Kinematically Decoupled Micropositioning Stage With a Centimeter Range Dedicated to Micro/Nano Manufacturing

Wang¹,

Liang²,

Tian³

et al. 2016

IEEE/ASME Trans. Mechatron.

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Dawei. (2015) A flexure-based kinematically decoupled micropositioning stage with a centimeter range dedicated to micro/nano manufacturing. IEEE/ASME Transactions on Mechatronics . Permanent WRAP url:http://wrap.warwick.ac.uk/76692 Copyright and reuse:The Warwick Research Archive Portal (WRAP) makes this work by researchers of the University of Warwick available open access under the following conditions. Copyright © and all moral rights to the version of the paper presented here belong to the individual author(s) and/or other copyright owners. To the extent reasonable and practicable the material made available in WRAP has been checked for eligibility before being made available.Copies of full items can be used for personal research or study, educational, or not-for profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way.Publisher's statement: "© 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting /republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works." A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP url' above for details on accessing the published version and note that access may require a subscription.

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A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning

Cited by 31 publications

References 3 publications

A Survey of Modeling and Control of Piezoelectric Actuators

A Survey of Modeling and Control of Piezoelectric Actuators

Design of high-bandwidth high-precision flexure-based nanopositioning modules

A Flexure-Based Kinematically Decoupled Micropositioning Stage With a Centimeter Range Dedicated to Micro/Nano Manufacturing

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