2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) 2023
DOI: 10.1109/mems49605.2023.10052552
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A Novel Piezoresistive Pressure Sensor Based on Cr-doped V2O3 Thin Film

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Cited by 4 publications
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“…When there is an external force, the internal material will deform and cause the resistance value to change. The piezoresistive tactile sensor has attracted much attention due to its advantages of high sensitivity, wide detection pressure range, simple structure, and easy integration [ 58 , 59 ]. However, the traditional piezoresistive tactile sensor needs an external power supply to convert the change of the resistance value into a current or voltage signal ( Figure 1 c), which greatly limits its application scenarios.…”
Section: Classification Of Self-powered Tactile Sensorsmentioning
confidence: 99%
“…When there is an external force, the internal material will deform and cause the resistance value to change. The piezoresistive tactile sensor has attracted much attention due to its advantages of high sensitivity, wide detection pressure range, simple structure, and easy integration [ 58 , 59 ]. However, the traditional piezoresistive tactile sensor needs an external power supply to convert the change of the resistance value into a current or voltage signal ( Figure 1 c), which greatly limits its application scenarios.…”
Section: Classification Of Self-powered Tactile Sensorsmentioning
confidence: 99%