A novel pneumatic actuator system realised by microelectro-discharge machining

Hirata, Toru; Akashi, Tomoyuki; Bertholds, A.; Gruber, Hans-Peter; Schmid, A.; Grétillat, M.-A.; Guénat, O.; Rooij, N. F. de

doi:10.1109/memsys.1998.659747

Cited by 16 publications

(20 citation statements)

References 14 publications

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“…In 1998, Hirata et al [52,53] designed a one-dimensional micro-conveyor. The fabrication combines microelectrodischarge machining and wet-etching.…”

Section: Tilted Air-jet Manipulatorsmentioning

confidence: 99%

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Laurent

Moon

2015

Intel Serv Robotics

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Many manipulation systems using air flow have been proposed for object handling in a non-prehensile way and without solid-to-solid contact. Potential applications include high-speed transport of fragile and clean products and high-resolution positioning of thin delicate objects. This paper discusses a comprehensive survey of state-of-the-art pneumatic manipulation from the macro scale to the micro scale. The working principles and actuation methods of previously developed air-bearing surfaces, ultra-sonic bearing surfaces, air-flow manipulators, air-film manipulators, and tilted air-jet manipulators are reviewed with a particular emphasis on the modeling and the control issues. The performance of the previously developed devices are compared quantitatively and open problems in pneumatic manipulation are discussed.

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“…In 1998, Hirata et al [52,53] designed a one-dimensional micro-conveyor. The fabrication combines microelectrodischarge machining and wet-etching.…”

Section: Tilted Air-jet Manipulatorsmentioning

confidence: 99%

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Laurent

Moon

2015

Intel Serv Robotics

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“…Several microtechniques (wet or dry etching) like laser machining [18], focused ion beam (FIB) machining [19], electrical discharge machining (EDM) [17] or plasma etching (DRIE) are often used to obtain holes in silicon substrate. It is rather difficult to make tilted holes with these kinds of micromachining techniques for two reasons: Even if we can believe that a wet isotropic silicon etching (KOH, TMAH) could be used to create tilted hole collectively, it unfortunately cannot overcome the natural etching directions imposed by the crystalline mesh (typically 54.7°and 35.3°for a (100) silicon wafer).…”

Section: Principle Of Tilted Air Jetmentioning

confidence: 99%

“…Two methods are proposed, the first one is based on air-flow orientation provided by an electrostatic actuator [14][15][16]. In the second one the flow orientation is carried out by passive actuator, where tilted slits are etched by Electro Discharge Machining (EDM) which is not a batch fabrication method and only one-dimensional pneumatic actuator is presented [17]. Our approach is similar to the last one.…”

Section: Introductionmentioning

confidence: 99%

A MEMS-based pneumatic micro-conveyor for planar micromanipulation

et al. 2012

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“…Two methods are proposed, the first one is based on air-flow orientation provided by an electrostatic actuator [14,15,16]. In the second one the flow orientation is carried out by passive actuator where inclined slits are etched [17].…”

Section: Introductionmentioning

confidence: 99%

A New Two-Dimensional Actuator for Air Flow Micro-manipulation

Yahiaoui¹,

Zeggari²,

Malapert³

et al. 2010

2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS

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International audienceA two dimensional pneumatic actuator based on silicon MEMS technology for objects micro-manipulation is presented. The device uses inclined air jets to levitate and convey micro-objects to the desired position. The structure consists of a sandwich of silicon-silicon-Pyrex layers fabricated using MEMS technologies such as deep reactive ion etching (DRIE) and ultrasonic micro-machining techniques. A two dimensional system composed of 64 micro-conveyors in about 9mm x 9 mm area was realized. Each micro-conveyor has four nozzles and can generate inclined air-jets which allow four conveyance directions. Two-dimensional conveyance of a silicon chip of 3 mm diameter and weighing approximately 2mg was performed with pulsed air flow of 20 kPa

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A novel pneumatic actuator system realised by microelectro-discharge machining

Cited by 16 publications

References 14 publications

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

A MEMS-based pneumatic micro-conveyor for planar micromanipulation

A New Two-Dimensional Actuator for Air Flow Micro-manipulation

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