2019
DOI: 10.3390/s19061301
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A Novel PZT Pump with Built-in Compliant Structures

Abstract: Different to the traditionally defined valved piezoelectric (PZT) pump and valveless PZT pump, two groups of PZT pumps with built-in compliant structures—with distances between the free ends of 0.2 mm (Group A) and 0 mm (Group B)—were designed, fabricated, and experimentally tested. This type of pump mainly contains a chamber 12 mm in diameter and 1.1 mm in height, a PZT vibrator, and two pairs of compliant structures arranged on the flowing channel. The flow-resistance differences between these two groups of … Show more

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Cited by 36 publications
(21 citation statements)
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“…In the high frequency region (>25 Hz), the amplitude decayed with increasing frequency and was accompanied by a few amplitude peak points. These peak points were related to the characteristic properties of the piezoelectric vibrator [16]. The measured flow-rate-frequency relationships of the SLFT PZT pump at different voltages are shown in Figure 12.…”
Section: Resultsmentioning
confidence: 97%
See 1 more Smart Citation
“…In the high frequency region (>25 Hz), the amplitude decayed with increasing frequency and was accompanied by a few amplitude peak points. These peak points were related to the characteristic properties of the piezoelectric vibrator [16]. The measured flow-rate-frequency relationships of the SLFT PZT pump at different voltages are shown in Figure 12.…”
Section: Resultsmentioning
confidence: 97%
“…It can be seen that the amplitude of the center point of the vibrator was positively correlated with the voltage, and these maximum amplitudes were 0.062 mm (40 V, 10 Hz), 0.095 mm (60 V, 10 Hz), 0.136 mm (80 V, 10 Hz), 0.217 mm (100 V, 11 Hz), and 0.228 mm (120 V, 10 Hz), as shown in Figure 11. In the low frequency region (1-25Hz), firstly, the amplitude of the piezoelectric vibrator increased with the increasing frequency (1-10 Hz), then, when the amplitude increased to a certain value, the amplitude decreased with the increasing frequency (11)(12)(13)(14)(15)(16)(17)(18)(19)(20)(21)(22)(23)(24)(25), and was approximately zero after 25 Hz. In the high frequency region (>25 Hz), the amplitude decayed with increasing frequency and was accompanied by a few amplitude peak points.…”
Section: Resultsmentioning
confidence: 99%
“…Recently, a millimeter-scale piezoelectric pump with built-in compliant structures was designed, fabricated, and experimentally tested by a group of researchers (Bao et al, 2019). This device had a chamber of 12 × 1.1 mm (diameter × height), a piezoelectric vibrator, and two pairs of valve featured elements on the flowing channel (Figure 1).…”
Section: Mechanical Micropumpsmentioning
confidence: 99%
“…The working principle of the proposed lead zirconate titanate (PZT) pump: (A) the pump chamber in suction stroke; (B) the inhaling principle during suction stroke; (C) the pump chamber in compression stroke; (D) the exhausting principle during compression stroke; (1) the piezoelectric ceramic; (2) the brass substrate;(3) the pump chamber; (4) the compliant structure; (5) the outlet channel; (6) the inlet channel. Reproduced fromBao et al (2019) with permission from MDPI Open Access Journals.…”
mentioning
confidence: 99%
“…Piezoelectric pumps are microfluidic machinery. Piezoelectric pumps have the advantages of simple structure, high driving strength, easy miniaturization, no magnetic influence and low noise [ 1 , 2 , 3 , 4 , 5 ], etc. They can be applied to biomedical [ 6 , 7 , 8 ], microelectromechanical systems [ 9 , 10 ] and fuel cells [ 11 , 12 ].…”
Section: Introductionmentioning
confidence: 99%