A novel route to compact, high performance pumping in UHV–XHV vacuum systems

Manini, Paolo; Conte, A.; Viale, Luca; Bonucci, Antonio; Caruso, Luciano

doi:10.1016/j.vacuum.2013.01.017

Cited by 14 publications

(2 citation statements)

References 7 publications

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“…The vacuum level reached is in the low 10 -11 mbar range (one order of magnitude better than the previous configuration) and no noticeable photoemission properties variation has been observed. The availability of a compact solution like the SAES NEXTorr® [7] pump which combines an even smaller ion pump (5 l /s for N 2 ) with a NEG pump may provide a further step towards more compact and reliable photocathode transport systems.…”

Section: Discussionmentioning

confidence: 99%

Use of non evaporable getter pumps to ensure long term performances of high quantum efficiency photocathodes

Sertore

Michelato

Monaco

et al. 2014

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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High quantum efficiency photocathodes are routinely used as laser triggered emitters in the advanced high brightness electron sources based on radio frequency guns. The sensitivity of “semiconductor” type photocathodes to vacuum levels and gas composition requires special care during preparation and handling. This paper will discuss the results obtained using a novel pumping approach based on coupling a 20 l s−1 sputter ion getter pump with a CapaciTorr® D100 non evaporable getter (NEG) pump. A pressure of 8⋅10−8 Pa was achieved using only a sputter ion pump after a 6 day bake-out. With the addition of a NEG pump, a pressure of 2⋅10−9 Pa was achieved after a 2 day bake-out. These pressure values were maintained without power due to the ability of the NEG to pump gases by chemical reaction. Long term monitoring of cathodes quantum efficiencies was also carried out at different photon wavelengths for more than two years, showing no degradation of the photoemissive film properties.

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Section: Discussionmentioning

confidence: 99%

Use of non evaporable getter pumps to ensure long term performances of high quantum efficiency photocathodes

Sertore

Michelato

Monaco

et al. 2014

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…This design is particularly appropriated for UHV/XHV systems having H 2 as the main background gas and Ar/CH 4 at a much smaller level. This allows to deliver very large speed in a compact and light package [9]. …”

Section: Perspective In Uhv/xhv Level: the Nextorr Pump Conceptmentioning

confidence: 99%

Non evaporable getter (NEG) technology: A powerful tool for UHV-XHV systems

Maccallini¹,

Siviero²,

Bonucci³

et al. 2012

AIP Conference Proceedings

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Articles you may be interested inCharacterization of alkali metal dispensers and non-evaporable getter pumps in ultrahigh vacuum systems for cold atomic sensors Abstract. Ultra and Extreme High Vacuum (UHV and XHV respectively) levels are needed in several vacuum-related applications for wide pressure and time range. The Non Evaporable Getter (NEG) technology is one of the most important examples to get XHV/UHV condition in the vacuum systems. In fact the high reactivity of the getter materials towards active gases in a wide temperature range (from room temperature to several hundreds of °C) allows removing very efficiently active gases such as H 2 , H 2 O, CO 2 , CO, N 2 , and so on. When declining, the pumping speed of NEG can be easily restored, by reactivating the getter material with a thermal process ("reactivation"). In this framework, SAES Getters S.p.A. has a long expertise in producing NEG pumps (and more in general NEG technology) which can provide vacuum conditions from the low to the ultra high level. An overall overview of NEG pump technology will be given in this paper considering 1) the involved mechanisms for gas adsorption into the NEG material, 2) operational conditions of NEG pumps and 3) example of applications which demonstrate the benefits of NEG pumps use in XHV/UHV systems. Future perspectives for NEG pumps in UHV/XHV applications will be also given.

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Vacuum Technology

Day

2014

Ullmann's Encyclopedia of Industrial Chemistry

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The article contains sections titled: 1. Introduction 2. Fundamental Aspects of Vacuum Science and Technology 2.1. Basic Principles and Terminology 2.1.1. Pressure Regimes 2.1.2. Equation of State of Gases 2.1.3. Kinetic Theory 2.1.4. Flow Regimes and Knudsen Number 2.1.5. Vacuum Pump Characteristics 2.1.6. Conductance 2.1.7. Pump‐Out Equation 2.2. Vacuum Gas Dynamics 2.2.1. Numerical Simulation Approaches 2.2.2. Pipe Flows 3. Vacuum Pumps 3.1. Positive Displacement Vacuum Pumps 3.1.1. Reciprocating Positive Displacement Pumps 3.1.2. Rotary Positive Displacement Pumps 3.1.2.1. Single Shaft Rotary Positive Displacement Pumps 3.1.2.2. Twin Shaft Rotary Positive Displacement Pumps 3.2. Kinetic Vacuum Pumps 3.2.1. Working Fluid Jet Pumps 3.2.2. Turbomolecular Pumps 3.2.3. Vapor Diffusion Pumps 3.3. Entrapment Vacuum Pumps 3.3.1. Sputter Ion Pumps 3.3.2. Getter Pumps 3.3.3. Cryopumps 4. Vacuum Diagnostics 4.1. Total Pressure Measurement 4.1.1. Mechanical Vacuum Instruments 4.1.2. Transport Coefficient Instruments 4.1.3. Ionization Vacuum Gauges 4.2. Partial Pressure Measurement 4.3. Leaks 5. Vacuum System Components 5.1. Piping Components 5.2. Valves 6. Vacuum Applications and Examples 6.1. Aspects of Vacuum System Design 6.2. Examples of Vacuum Systems 6.2.1. Steel Degassing 6.2.2. Thin Film Deposition 6.2.3. Vacuum Systems of Fusion Devices 6.2.4. Ultrahigh Vacuum Systems of Accelerator Storage Rings

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A novel route to compact, high performance pumping in UHV–XHV vacuum systems

Cited by 14 publications

References 7 publications

Use of non evaporable getter pumps to ensure long term performances of high quantum efficiency photocathodes

Use of non evaporable getter pumps to ensure long term performances of high quantum efficiency photocathodes

Non evaporable getter (NEG) technology: A powerful tool for UHV-XHV systems

Vacuum Technology

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