A novel self-aligned electrostatic vertical actuator using plastic deformation technology

Li, Wei; Song, Zhijie; Ge, Xiaohong; Che, Lufeng; Wang, Yuelin

doi:10.1007/s00542-013-1851-7

Cited by 2 publications

(2 citation statements)

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“…(2) The average temperature can be determined indirectly by measuring heater resistance, and it has been validated to be an accurate strategy for obtaining SU-8 actuator displacement, which provides Performance Ref. [19] Ref. [20] Ref.…”

Section: Micro-deformation Modificationmentioning

confidence: 99%

“…To solve this problem, much work has been performed with post-tuning strategies, including electrostatic, piezoelectric and thermal actuation strategies [16][17][18]. Although electrostatic actuators have the characteristics of precise positioning and a quick response, the dynamic pull-in effect and special metal electrode increase complexity for integration [19]. Large-stroke piezoelectric actuators were reported to modify a deformable mirror with a deflection of 4.5 μm whilst requiring a 100 V operating voltage [20].…”

Section: Introductionmentioning

confidence: 99%

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Arrayed SU-8 polymer thermal actuators with inherent real-time feedback for actively modifying MEMS’ substrate warpage

Wang

Xiao

Chen

et al. 2016

J. Micromech. Microeng.

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This paper describes the design, fabrication and characterization of a batch-fabricated micro-thermal actuators array with inherent real-time self-feedback, which can be used to actively modify micro-electro-mechanical systems’ (MEMS’) substrate warpage. Arrayed polymer thermal actuators utilize SU-8 polymer (a thick negative photoresist) as a functional material with integrated Ti/Al film-heaters as a microscale heat source. The electro-thermo-mechanical response of a micro-fabricated actuator was measured. The resistance of the Al/Ti film resistor varies obviously with ambient temperature, which can be used as inherent feedback for observing real-time displacement of activated SU-8 bumps (0.43 μm Ω−1). Due to the high thermal expansion coefficient, SU-8 bumps tend to have relatively large deflection at low driving voltage and are very easily integrated with MEMS devices. Experimental results indicated that the proposed SU-8 polymer thermal actuators (array) are able to achieve accurate rectification of MEMS’ substrate warpage, which might find potential applications for solving stress-induced problems in MEMS.

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Section: Micro-deformation Modificationmentioning

confidence: 99%