A Novel Self-Powered, High-Sensitivity Piezoelectric Vibration Sensor Based on Piezoelectric Combo Effect

Hadidi, Sajad; Hassanzadeh, Alireza

doi:10.1109/jsen.2023.3317445

IEEE Sensors J.

2023

DOI: 10.1109/jsen.2023.3317445

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A Novel Self-Powered, High-Sensitivity Piezoelectric Vibration Sensor Based on Piezoelectric Combo Effect

Sajad Hadidi,

Alireza Hassanzadeh

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Cited by 5 publications

References 25 publications

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Hassanzadeh

2024

AEU - International Journal of Electronics and Communications

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A high-efficiency optimized bias-flip energy harvesting system for IoT applications

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2024

AEU - International Journal of Electronics and Communications

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A Highly Sensitive MEMS Three-Dimensional Force Sensor based on Piezoresistive Cantilever with Stress Concentration

li,

Hou,

Sun

et al. 2024

J. Phys.: Conf. Ser.

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This study presents a highly sensitive 3D force sensor based on a piezoresistive cantilever with stress concentration. The sensor achieves precise 3D force detection by integrating a polydimethylsiloxane (PDMS) cap with pyramid microstructures and silicon chip containing four piezoresistive cantilevers with a micro-hole at their root. Finite element simulation validates the superior performance of the micro-hole in enhancing the sensitivity of the force sensor. Compared to a traditional sensor based on a piezoresistive cantilever, the microhole design increases strain in the piezoresistive region of the cantilever by 2 times and the stress by 2.72 times. The proposed sensor exhibits promising potential for applications in various fields, including medical devices, robotics, industrial automation, and others.

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A Novel Self-Powered, High-Sensitivity Piezoelectric Vibration Sensor Based on Piezoelectric Combo Effect

Cited by 5 publications

References 25 publications

A high-efficiency optimized bias-flip energy harvesting system for IoT applications

A high-efficiency optimized bias-flip energy harvesting system for IoT applications

Self-powered asphalt-based sensors for smart roads

A Highly Sensitive MEMS Three-Dimensional Force Sensor based on Piezoresistive Cantilever with Stress Concentration

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