A novel silicon membrane-based biosensing platform using distributive sensing strategy and artificial neural networks for feature analysis

Abstract

A novel biosensing system based on a micromachined rectangular silicon membrane is proposed and investigated in this paper. Distributive sensing scheme is designed to monitor the dynamics of the sensing structure.An artificial neural network is used to process the measured data and to identify cell presence and density. Without specifying any particular bio-application, the investigation is mainly concentrated on the performance testing of this kind of biosensor as a general biosensing platform. The biosensing experiments on the microfabricated membranes involve seeding different cell densities onto the sensing surface of membrane, and measuring the corresponding dynamics information of each tested silicon membrane in the form of a series of frequency response functions (FRFs). All of those experiments are carried out in a cell culture medium to simulate a practical working environment. The EA.hy 926 endothelial cell lines are chosen in this paper for the bio-experiments. The EA.hy 926 endothelial cell lines represent a particular class of biological particles that have unregular shapes, non-uniform density and uncertain growth behaviour, which are difficult to monitor using the traditional biosensors. The final predicted results reveal that the methodology of a neural-network based algorithm to perform the feature identification of cells from distributive sensory measurement, has great potential in biosensing applications.

Dynamic analysis of submerged microscale plates: the effects of acoustic radiation and viscous dissipation

“…The natural frequencies and damping ratios of each microplate can be determined from the FRF curves by a modal analysis procedure [19]. It was proved by previous work [19] that the predicted resonant frequencies for the three fluid-loaded microplates are well matched with the results of a Rayleigh-Ritz model [5] and experimental testing [19]. In table 1, the damping ratios of the three different types (boundary conditions) microplates that are predicted using the Table 1.…”

“…The fluid-loading impedance is numerically evaluated using a quasi-Monte Carlo method, which is an effective means to perform the complicated numerical integration with singularities. The natural frequencies and damping ratios of each microplate can be determined from the FRF curves by a modal analysis procedure [19]. It was proved by previous work [19] that the predicted resonant frequencies for the three fluid-loaded microplates are well matched with the results of a Rayleigh-Ritz model [5] and experimental testing [19].…”

“…The relations between the damping ratios and the cantileversubstrate gaps have been studied by Basak et al [16] using finite-element modelling and Decuzzi et al [17] based on a semi-analytical model. The manufacturing method that was proposed by the present authors [18,19] does not procedure a substrate underneath the microplates, which makes it appropriate to ignore the rigid-wall effect in the plate vibration analysis.…”

Membrane-based chemomechanical transducer for the detection of aptamer-protein binding

“…First, shell structures are more robust and stable than cantilevers, but is still very sensitive to surface reaction [4], therefore, can be easily functionalized and probed by using commercially available fabrication techniques [5]. Secondly, the reaction surface is physically isolated from the electrical sensing surface which can be easily implemented for a precise low-noise capacitance measurement technology [6].…”

Large-scale membrane transfer process: its application to single-crystal-silicon continuous membrane deformable mirror

“…Silicon membranes are widely used for a variety of applications of microelectromechannical systems (MEMS), such as pressure sensors [1], biosensors [2] and microphone [3]. One of the important application areas is optics, various types of varifocal mirrors, and deformable mirrors for generating a desired wave front of reflected wave.…”