A Novel Sustaining Mechanism in Capacitively Coupled Radio Frequency Plasma in Oxygen

Shibata, Mari; Makabe, Toshiaki; Nakano, Nobuhiko

doi:10.1143/jjap.37.4182

Cited by 14 publications

(10 citation statements)

References 13 publications

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“…As it has been observed in oxygen discharges [78][79][80] as well as in other electronegative plasmas [81][82][83][84], a double layer may appear in electronegative discharges under certain conditions. The formation of a double layer leads to a peak in the electron density localized in front of the electrode sheaths around the time of sheath collapse.…”

Section: Control Of the Density Profilesmentioning

confidence: 66%

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Schüngel¹,

Zhang²,

Iwashita³

et al. 2011

J. Phys. D: Appl. Phys.

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To cite this version:E Schüngel, Q-Z Zhang, S Iwashita, J Schulze, L-J Hou, et al.. Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect. Journal of Physics D: Applied Physics, IOP Publishing, 2011, 44 (28) Abstract. By using a combined experimental, numerical and analytical approach, we investigate the control of plasma properties via the Electrical Asymmetry Effect (EAE) in a capacitively coupled oxygen discharge. In particular, we present the first experimental investigation of the EAE in electronegative discharges. A dual-frequency voltage source of 13.56 MHz and 27.12 MHz is applied to the powered electrode and the discharge symmetry is controlled by adjusting the phase angle θ between the two harmonics. It is found that the bulk position and density profiles of positive ions, negative ions, and electrons have a clear dependence on θ, while the peak densities and the electronegativity stay rather constant, largely due to the fact that the time averaged power absorption by electrons is almost independent of θ. This indicates that the ion flux towards the powered electrode remains almost constant. Meanwhile, the dc self-bias and, consequently, the sheath widths and potential profile can be effectively tuned by varying θ. This enables a flexible control of the ion bombarding energy at the electrode. Therefore, our work proves the effectiveness of the EAE to realize separate control of ion flux and ion energy in electronegative discharges. At low pressure, the strength of resonance oscillations, which are found in the current of asymmetric discharges, can be controlled with θ.

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Section: Control Of the Density Profilesmentioning

confidence: 66%

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Schüngel¹,

Zhang²,

Iwashita³

et al. 2011

J. Phys. D: Appl. Phys.

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“…A large number of experimental and theoretical papers studying the characteristics of this type of the discharge were published (see, e.g., [6][7][8][9][10][11][12][13][14][15][16][17]). Let us present a brief review of main results obtained with the RF discharge in oxygen.…”

Section: Introductionmentioning

confidence: 99%

“…Aoyagi et al [14] observed the intense OI emission just in front of the instantaneous cathode in O 2 gas discharge at 1 MHz, which is considered to be due to the excitation caused by the recombination collisions. Shibata et al [15] performed numerical analysis of oxygen RF discharge between parallel plates with laser irradiation parallel to the electrode using the relaxation continuum model. They also presented [16] numerical evidence regarding a new type of self-sustaining mechanism for RF oxygen plasma when new electrons are generated in the bulk plasma by the detachment reaction from negative ions with high density under the condition of a relatively high bulk field.…”

Section: Introductionmentioning

confidence: 99%

“…Shibata et al [15] performed numerical analysis of oxygen RF discharge between parallel plates with laser irradiation parallel to the electrode using the relaxation continuum model. They also presented [16] numerical evidence regarding a new type of self-sustaining mechanism for RF oxygen plasma when new electrons are generated in the bulk plasma by the detachment reaction from negative ions with high density under the condition of a relatively high bulk field. Katch et al [17] found that the plasma of a 13.56 MHz capacitively coupled oxygen discharge of the GEC reference cell exhibits fluctuations of the plasma potential and light emission in the kilohertz range.…”

Section: Introductionmentioning

confidence: 99%

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Double layer onset inside the near-electrode sheath of a RF capacitive discharge in oxygen

Lisovskiy

Yegorenkov

2006

Vacuum

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This paper reports the axial profiles of the electron temperature T e in the RF capacitive discharge in oxygen recorded with a probe technique. We observed the T e peaks near the boundaries of the sheaths as well as inside the near-electrode sheath. The T e peak inside the sheath is, probably, due to the formation of the double layer at the anode phase of this near-electrode sheath. The assumption of a double layer formation is also supported by the photos of the sheath glow making evident the bright region inside the sheath. The results of our measurements agree with our fluid simulation satisfactorily. r

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“…A large number of experimental and theoretical papers studying the characteristics of this type of the discharge were published (see, e.g. [4][5][6][7][8][9][10][11][12][13][14][15]). But up to now the data are actually absent on the regimes of RF-capacitive discharge in oxygen and on the transition of the discharge from a weak-current (a-) to a strong-current (g-) regime (a-g transition).…”

Section: Introductionmentioning

confidence: 99%

Alpha–gamma transition in RF capacitive discharge in low-pressure oxygen

Lisovskiy

Yegorenkov

2004

Vacuum

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We report the recorded current-voltage characteristics of a RF capacitive discharge in oxygen. Low-frequency oscillations of the plasma potential in a kilohertz frequency range are observed to accompany the transition of the discharge from a weak-(a-) to a strong-current (g-) regime in the low-pressure range. The weak-current regime of the RF capacitive discharge is observed within the pressure range limited not only from the medium pressure side but also from the lower-pressure one. Electron temperature and plasma density are registered with a probe technique. r

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A Novel Sustaining Mechanism in Capacitively Coupled Radio Frequency Plasma in Oxygen

Cited by 14 publications

References 13 publications

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Double layer onset inside the near-electrode sheath of a RF capacitive discharge in oxygen

Alpha–gamma transition in RF capacitive discharge in low-pressure oxygen

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