2012
DOI: 10.1016/j.sna.2012.01.015
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A novel technique for MEMS packaging: Reactive bonding with integrated material systems

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Cited by 86 publications
(41 citation statements)
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“…The geometry of the needles depends on the etch process [15]. In this work, nanostructure etching is performed in an Oxford RIE reactor with a pressure of 100 mTorr, working at a power of 100 W and 20 • C with helium backing, using a gas flow of 84 sccm SF 6 , and 66 sccm O 2 . P-doped (111) silicon wafers are used as the substrate.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The geometry of the needles depends on the etch process [15]. In this work, nanostructure etching is performed in an Oxford RIE reactor with a pressure of 100 mTorr, working at a power of 100 W and 20 • C with helium backing, using a gas flow of 84 sccm SF 6 , and 66 sccm O 2 . P-doped (111) silicon wafers are used as the substrate.…”
Section: Methodsmentioning
confidence: 99%
“…The direct deposition of reactive layers on components expands the material variety and allows improved stress control. Sputtered Ti/Si and Al/Pd multilayers form bond interfaces using Sn solder for the assembly of silicon MEMS at room temperature [6]. These integrated RML allow the direct and hermetic bond between two silicon chips and between silicon and ceramic, and glass and metal as well [7].…”
Section: Introductionmentioning
confidence: 99%
“…Due to the high reaction temperatures the iron melts and fills in the joining gap in molten form. In the past 15 years, research groups started to adapt comparable processes for microsystems technologies, using the term of integrated reactive material systems [3,4]. While the new processes completely differ from thermite welding in means of used materials, the concept of using the energy emitted by a self-sustaining reaction for bonding is comparable.…”
Section: Introductionmentioning
confidence: 99%
“…This 140 review places emphasis on material science aspects of nano-struc- 141 tured reactive systems. 142 Analysis of recent research papers on heterogeneous combus- 143 tion has clearly revealed that the new classes of reactive systems, 144 which are characterized by nanosized-scale and possess extremely 145 high reactivity, as compared to similar reactive systems with 146 micro-scale heterogeneity, has attracted the attention of 147 researchers and has dominated R&D. The present paper gives an 148 overview of four classes of such reactive nano-media: (i) mechani- 149 cally-structured composites; (ii) sol-gels; (iii) mixtures of metal 150 and metal-oxide nanopowders, i.e., so-called, super thermite 151 compositions and (iv) multilayer nano-foils. Research in each of 152 these areas is being performed almost independently and cross- 153 references are rare.…”
mentioning
confidence: 99%