A novel terahertz detector technology based on vacuum electronics

Kawai, Naoya; Buchmann, Tobias Olaf; Takahashi, Hiroyasu; Katsuyama, Kota; Lange, Simon Jappe; Sebek, Matej; Jepsen, Peter Uhd; Satozono, Hiroshi; Ohmura, Takayuki

doi:10.1117/12.2650553

Cited by 2 publications

(2 citation statements)

References 3 publications

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“…In parallel, there have been significant strides in studying THzinduced tunnelling, [24,25] fueling the development of a novel class of THz optical detectors. [26,27] This innovative approach employs THz metasurfaces, leading to a local field enhancement and subsequent electron emission via Fowler-Nordheim (FN) tunnelling. Here, we show a distinct sensing of Angstrom (Å)-scale thin dielectric film realized via FN electron tunnelling at THz frequencies.…”

Section: Introductionmentioning

confidence: 99%

Terahertz Sensing of Å‐scale Thin Dielectric Film Via Electron Tunnelling

Sebek,

Buchmann,

Jepsen

et al. 2024

Advanced Optical Materials

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Precise sensing of ultrathin dielectric films is paramount in various fields including nanoscale dielectric characterization, advanced material development, and quality control in microelectronics manufacturing. However, achieving this with conventional detection techniques within the terahertz (THz) frequency range has remained challenging due to their limited sensitivity and resolution. In this study, a novel approach is reported that utilizes Fowler‐Nordheim (FN) tunnelling at a metal‐dielectric junction, which drastically improves the sensitivity to changes in dielectric film thickness down to the Angstrom scale. Through a detailed analysis of both experimental and simulated data, it is demonstrated that the FN tunnelling‐based THz sensing technique exhibits exceptional sensitivity. This finding not only overcomes the limitations of traditional detection techniques, but also paves the way for novel ultrathin film sensing capabilities in the rapidly advancing field of THz technology.

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Section: Introductionmentioning

confidence: 99%

Terahertz Sensing of Å‐scale Thin Dielectric Film Via Electron Tunnelling

Sebek,

Buchmann,

Jepsen

et al. 2024

Advanced Optical Materials

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“…To our knowledge, this research is pioneering in demonstrating the sensing of Å-scale dielectric films utilizing THz lightwaves. [11][12][13][14]…”

Section: Introductionmentioning

confidence: 99%

Terahertz sensing of sub-nm dielectric film via electron tunnelling

Sebek,

Buchmann,

Jepsen

et al. 2023

Infrared, Millimeter-Wave, and Terahertz Technologies X

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Terahertz (THz) sensing of ultrathin layers has been a longstanding challenge due to limitations in conventional detection techniques. In this study, we present a novel approach for sensing sub-1 nm thin dielectric layers based on Fowler-Nordheim (FN) tunneling. Our method exploits the FN tunneling effect at a metal-dielectric interface, enabling sensitive detection of changes in dielectric layer thickness within the THz frequency range. To validate our FN tunneling-based THz sensing technique, we carried out a comprehensive analysis of experimental and simulated data. Our findings demonstrate that this approach exhibits exceptional sensitivity, capable of detecting dielectric layers with thicknesses down to the sub-nanometer scale. Such sensitivity has significant implications for various applications, including nanoscale dielectric characterization, advanced material development, and quality control in microelectronics manufacturing. The FN tunneling-based THz sensing methodology not only overcomes the limitations of traditional detection techniques but also paves the way for novel ultrathin layer sensing capabilities in the rapidly advancing field of terahertz technology. Our study showcases the potential of this groundbreaking technique to revolutionize the THz sensing landscape, offering new opportunities for research and development in various fields.

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A novel terahertz detector technology based on vacuum electronics

Cited by 2 publications

References 3 publications

Terahertz Sensing of Å‐scale Thin Dielectric Film Via Electron Tunnelling

Terahertz Sensing of Å‐scale Thin Dielectric Film Via Electron Tunnelling

Terahertz sensing of sub-nm dielectric film via electron tunnelling

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