A Novel Virtual Accelerometer Array Using One Single Device Based on Time Intervals Measurement

Li, Enfu; Shen, Qiang; Hao, Yongcun; Xun, Wenpeng; Chang, Honglong

doi:10.1109/icsens.2018.8589594

Cited by 4 publications

(2 citation statements)

References 12 publications

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“…The test system of the MEMS sensor is mainly composed of a resonant accelerometer device [37], control circuit, data acquisition unit using Agilent 34410 with sampling frequency of 15 Hz to collect the output of sensors, and the PC that is connected to 34410 by USB-port communication interface and online process the measurement data by the proposed method. Figure 3 shows the overall test system of the MEMS sensor.…”

Section: Experimental Test and Comparisonmentioning

confidence: 99%

A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances

et al. 2019

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This paper first presents an adaptive expectation-maximization (AEM) control algorithm based on a measurement-data-driven model to reduce the variance of microelectromechanical system (MEMS) accelerometer sensor under multi disturbances. Significantly different characteristics of the disturbances, consisting of drastic-magnitude, short-duration vibration in the external environment, and slowly-varying, long-duration fluctuation inside the sensor are first constructed together with the measurement model of the accelerometer. Next, through establishing a data-driven model based on a historical small measurement sample, the window length of filter of the presented algorithm is adaptively chosen to estimate the sensor state and identify these disturbances simultaneously. Simulation results of the proposed AEM algorithm based on experimental test are compared with the Kalman filter (KF), least mean square (LMS), and regular EM (REM) methods. Variances of the estimated equivalent input under static condition are 0.212 mV, 0.149 mV, 0.015 mV, and 0.004 mV by the KF, LMS, REM, and AEM, respectively. Under dynamic conditions, the corresponding variances are 35.5 mV, 2.07 mV, 2.0 mV, and 1.45 mV, respectively. The variances under static condition based on the proposed method are reduced to 1.9%, 2.8%, and 27.3%, compared with the KF, LMS, and REM methods, respectively. The corresponding variances under dynamic condition are reduced to 4.1%, 70.1%, and 72.5%, respectively. The effectiveness of the proposed method is verified to reduce the variance of the MEMS resonant accelerometer sensor.

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Section: Experimental Test and Comparisonmentioning

confidence: 99%

A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances

et al. 2019

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“…The researchers at NPU (the authors of this paper) proposed another implementation method of a time domain sensor [30,31], where the output voltage of the capacitance device is used to indirectly represent the displacement of the resonant mass, while the voltage reference points (VRPs) are used to indirectly represent the DRPs. Utilizing a traditional capacitance device and a capacitance-to-voltage (C-V) interface circuit, the indirect representation was achieved.…”

Section: Introductionmentioning

confidence: 99%

Characterization of Sensitivity of Time Domain MEMS Accelerometer

Li,

Jian,

Yang

et al. 2024

Micromachines

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This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing the amplitude and frequency. The sensitivity with minor nonlinearity is chosen to evaluate the time domain sensor. The experimental results of the developed accelerometer demonstrate that the sensitivities span from −68.91 μs/g to −124.96 μs/g and the 1σ noises span from 8.59 mg to 6.2 mg (amplitude of 626 nm: −68.91 μs/g and 10.21 mg; amplitude of 455 nm: −94.51 μs/g and 7.76 mg; amplitude of 342 nm: −124.96 μs/g and 6.23 mg), which indicates the bigger the amplitude, the smaller the sensitivity and the bigger the 1σ noise. The adjustable sensitivity provides a theoretical foundation for range self-adaption, and all the results can be extended to other time domain inertial sensors, e.g., a gyroscope or an inclinometer.

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Novel acceleration measurement method during attenuation vibration of inertial sensor based on time domain sensing mechanism

Jian

Hao³

et al. 2023

Measurement

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A Novel Virtual Accelerometer Array Using One Single Device Based on Time Intervals Measurement

Cited by 4 publications

References 12 publications

A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances

A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances

Characterization of Sensitivity of Time Domain MEMS Accelerometer

Novel acceleration measurement method during attenuation vibration of inertial sensor based on time domain sensing mechanism

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