INTRODUCTIONThe growth of intermetallic layers at the solder/contact pad interface is an important concern in microelectronic packages, as the reliability of the solder interconnection may be degraded by their growth. It has been noted during reflow soldering of Sn-based solder on a Cu pad that the growth of Cu 6 Sn 5 and Cu 3 Sn intermetallic layers cannot be described accurately as a parabolic function of reflow time. Instead, the growth was predicted well with power-law kinetics. When the growth kinetics of a layer are controlled by volumetric diffusion through the planar intermetallic layer, the time exponent should be 1/2, and when controlled by chemical reaction at the interface, the exponent should be 1.0. Time exponents of the growth curve measured with eutectic Sn-Pb solder on a Cu pad, however, were significantly different from the theoretical values, ranging from 0.21 to 0.37. 1-5 These results indicate that neither the volumetric diffusion through the layer nor the reaction at the interface is the rate-controlling step of the intermetallic layer formation reaction. In addition, the wide variation in time-exponent values might be an indication of varying rate-controlling steps depending on the conditions of reflow soldering.A number of studies have been conducted to investigate the causes of such nonparabolic growth behaviors. Several authors claim that channels between scalloplike grains filled with liquid solder or coarsening of grains in the intermetallic layer are responsible for such behavior. 2-4,6-10 The channels were found to form as a result of wetting of grain boundaries by liquid-phase solders 11 and may serve as a fast mass-transport route for the formation reaction. Coarsening of the grains reduces the area fractions of the channel and of the grain boundary, which is also a fast mass-transport route.The coarsening kinetics of grains in the intermetallic layer during reflow soldering are complicated because of the presence of mass fluxes originating not only from the Gibbs-Thompson effect but also from Cu dissolution. Kim and Tu 9 analyzed the coarsening of scalloplike grains during reflow soldering by considering two types of mass fluxes, namely, reaction and ripening flux. The reaction flux denotes the mass flux of Cu through the channel, driven by the Cu-concentration gradient. The Cu dissolves at the bottom of the channel, where the solder and the Cu pad are in direct contact. The Cu atoms diffuse through the channel and react with Sn at the surface of the layer to increase the thickness of the intermetallic layer, i.e., reaction flux. The ripening flux denotes the mass flux driven by the Gibbs-Thompson effect. The coarsening behavior of scalloplike grains predicted from the two types of mass fluxes was in good agreement with experimental measurements. 6The kinetics of the intermetallic layer formation at Sn-37wt.%Pb solder/Cu pad interface during reflow soldering were studied. The growth kinetics were analyzed theoretically by assuming that the mass flux of Cu through channels between ...