2003
DOI: 10.1002/adma.200304947
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A p‐Type Amorphous Oxide Semiconductor and Room Temperature Fabrication of Amorphous Oxide p–n Heterojunction Diodes

Abstract: Oxide electronics, which together with amorphous semiconductors could become a rapid‐growth field, have come a step closer with the first report of a p‐type amorphous oxide semiconductor, ZnO·Rh2O3. The thin‐film deposition of this material at room temperature and the fabrication of p–n heterojunction diodes on flexible plastic sheets (see Figure) are demonstrated.

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Cited by 156 publications
(133 citation statements)
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“…[66,67] High conductivity has also been shown experimentally in non-Cu metal oxides, most notably spinel-structured TCOs, such as NiCo 2 O 4 , [68,69] perovskites-structured TCOs, such as SrIn x Ti 1-x O 3 and Sr x La 1-x CrO 3 , [70,71] and amorphous or composite oxides, such as ZnO·Rh 2 O 3 and In:MoO 3 . [72,73] Other oxides, such as doped Cr 2 O 3 and Ba 2 BiTaO 6 , have promise but remain to be synthesized with high conductivities. [74,75] A second, more recently employed approach is to look beyond oxides.…”
Section: P-type Transparent Conductorsmentioning
confidence: 99%
“…[66,67] High conductivity has also been shown experimentally in non-Cu metal oxides, most notably spinel-structured TCOs, such as NiCo 2 O 4 , [68,69] perovskites-structured TCOs, such as SrIn x Ti 1-x O 3 and Sr x La 1-x CrO 3 , [70,71] and amorphous or composite oxides, such as ZnO·Rh 2 O 3 and In:MoO 3 . [72,73] Other oxides, such as doped Cr 2 O 3 and Ba 2 BiTaO 6 , have promise but remain to be synthesized with high conductivities. [74,75] A second, more recently employed approach is to look beyond oxides.…”
Section: P-type Transparent Conductorsmentioning
confidence: 99%
“…This is in contrast to earlier reports of the dependency of the conductivity on higher growth temperatures (>500 • C) 15 , and the requirement of crystallinity to retain p-type properties. 16 This also means that the Cu deficient nanocrystalline material is compatible with flexible substrates such as polyimides and flexible glass (typically <400 • C process temperatures). This is the best performing ptype TCM grown by solution methods to date (excluding reports on single-crystal substrates 17 ), surpassing the previous value of 151 µS.…”
mentioning
confidence: 99%
“…2. The as-deposited IZO TFTs exhibit normally-on characteristics, originating from the fact that the IZO films contain many carriers due to a relatively large nonstoichiometric chemical composition, i.e., oxygen vacancies (20,21). After the postdeposition annealing in O 2 and N 2 was performed, the device appeared to switch characteristics.…”
Section: Resultsmentioning
confidence: 99%