Abstract. This paper addresses the development and characterization of a non-intrusive
silicon-based microsensor, which can detect electric partial discharges in
electrical insulation equipment. Early partial discharge detection prevents
failures and can be used to optimize maintenance operations. Despite the
potential that CMOS technology offers, miniaturized electric discharge
detector has neither been investigated nor implemented, until now. The
developed microsensor demonstrates its ability to record electric discharge
emission thanks to the presence of a miniaturized planar inductor. The
squared inductor of 50 turns with a side length of 1.5 mm used in our sensor
has been fabricated on top of a silicon substrate in a CMOS technology. The
total inductor wire length of loop antenna is 30 cm to achieve 100 MHz
bandwidth. Using the microsensor at 1 cm from the discharge site, a damped
sinusoidal induced voltage with an amplitude of 2 V has been measured at its
output. We observed that the output signal spectrum is highly concentrated
around a central resonance frequency, which remains constant. The main
advantage of such design resides in its monolithic integration added to the
high autonomy, which improves the microsensor efficiency.