A Performance Enhancement Method for MEMS Thermopile Pirani Sensors Through <i>In-Situ</i> Integration of Nanoforests

Xu, Shaohang; Shi, Meng; Zhou, Na; Zhao, Ying‐Zheng; Zhou, Na; Huang, Chengjun

doi:10.1109/led.2022.3201907

Cited by 8 publications

(4 citation statements)

References 18 publications

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“…We have simulated the sensitivity of the Pirani gauge for different pressure interval segments separately, and the sensitivity of the Pirani gauge shows the change, as shown in Figure 8 c,d, with the increase of the area of the thermal zone. The sensitivity S of the Pirani gauge is defined as the slope of the device output voltage variation curve with a logarithmic air pressure of

[ 21 ]. It is calculated as follows:

where S is the Pirani gauge sensitivity, and V is the device output voltage.…”

Section: Optimization Of Pirani Gauge Parametersmentioning

confidence: 99%

Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

Guo

Feng

Chen

et al. 2022

Sensors

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We have designed a hot-plate-type micro-Pirani vacuum gauge with a simple structure and compatibility with conventional semiconductor fabrication processes. In the Pirani gauge, we used a vanadium oxide (VOx) membrane as the thermosensitive component, taking advantage of the high temperature coefficient of resistance (TCR) of VOx. The TCR value of VOx is −2%K−1∼−3%K−1, an order of magnitude higher than those of other thermal-sensitive materials, such as platinum and titanium (0.3%K−1∼0.4%K−1). On one hand, we used the high TCR of VOx to increase the Pirani sensitivity. On the other hand, we optimized the floating structure to decrease the thermal conductivity so that the detecting range of the Pirani gauge was extended on the low-pressure end. We carried out simulation experiments on the thermal zone of the Pirani gauge, the width of the cantilever beam, the material and thickness of the supporting layer, the thickness of the thermal layer (VOx), the depth of the cavity, and the shape and size. Finally, we decided on the basic size of the Pirani gauge. The prepared Pirani gauge has a thermal sensitive area of 130 × 130 μm2, with a cantilever width of 13 μm, cavity depth of 5 μm, supporting layer thickness of 300 nm, and VOx layer thickness of 110 nm. It has a dynamic range of 10−1~104 Pa and a sensitivity of 1.23 V/lgPa. The VOx Pirani was designed using a structure and fabrication process compatible with a VOx-based uncooled infrared microbolometer so that it can be integrated by wafer level. This work contains only our MEMS Pirani gauge device design, preparation process design, and readout circuit design, while the characterization and relevant experimental results will be reported in the future.

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[ 21 ]. It is calculated as follows:

where S is the Pirani gauge sensitivity, and V is the device output voltage.…”

Section: Optimization Of Pirani Gauge Parametersmentioning

confidence: 99%

Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

Guo

Feng

Chen

et al. 2022

Sensors

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“…As a non-contact infrared temperature measurement device, thermopile is widely used in various fields (Xu et al, 2022). However, the temperature measurement accuracy of thermopiles is often affected by changes in ambient temperature, which leads to inaccurate temperature measurement results.…”

Section: Introductionmentioning

confidence: 99%

GA-BP Optimization Using Hybrid Machine Learning Algorithm for Thermopile Temperature Compensation

Aifen,

Shuwan,

Huan

2024

International Journal of Information Technology and Web Engineering

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Thermoelectric pile, which uses non-contact infrared temperature measurement principle, is widely used in various precision temperature measuring instruments. This paper analyzes environmental temperature's influence on thermoelectric piles' measurement accuracy and proposes a environment temperature compensation based on GA-BP (Genetic Algorithm-Back Propagation) neural network. The GA algorithm makes up for the slow iterative speed and easy to fall into local optimization of BP algorithm. The experimental simulation results show that environment temperature compensation based on GA-BP can accurately correct the measurement error caused by environmental temperature and other factors.

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“…To * Author to whom any correspondence should be addressed. enlarge the lower limit of measurable vacuum, Völklein et al reduced solid thermal conductance and radiative thermal conductance correspondingly by using four beams to suspend sensitive region and depositing gold film on both sides of sensitive region, and their sensor could measure vacuum from 1.3 × 10 −4 to 133 Pa [7]; Dams et al and Xu et al increased the gaseous thermal conductance separately by increasing the area of sensitive region and integrating nanoforests on the sensitive region, and the pressure range of their sensors are 10 −3 -10 5 Pa and 5 × 10 −2 to 10 5 Pa, respectively [8,9]. To expand the upper limit of measurable vacuum, there are mainly two methods.…”

Section: Introductionmentioning

confidence: 99%

A combined MEMS thermal vacuum sensor with a wide pressure range

Yuan,

Fu,

et al. 2023

J. Micromech. Microeng.

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MEMS thermal vacuum sensors have been widely applied in many academic and industry fields, and pressure range is a key performance of MEMS thermal vacuum sensors. To extend the pressure range, a combined MEMS thermal vacuum sensor that consists of two diode-type MEMS thermal vacuum sensors in series is proposed in this work. The two diode-type sensors are designed to have different areas of sensitive region and distances between sensitive region and heat sink, and their responses to the pressure are from 3.0 × 10−3 to 3 × 104 Pa and from 1.7 × 10−2 to 4.4 × 105 Pa, respectively. By series-connecting them, the combined sensor achieves a pressure range of 1.3 × 10−3 to 6.9 × 105 Pa without any additional control circuit. In addition, it possesses a relatively small size of 400 × 300 μm2. These indicate that the combined MEMS thermal vacuum sensor has the characteristics of wide pressure range, high sensitivity and small size.

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A Performance Enhancement Method for MEMS Thermopile Pirani Sensors Through In-Situ Integration of Nanoforests

Cited by 8 publications

References 18 publications

Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement

GA-BP Optimization Using Hybrid Machine Learning Algorithm for Thermopile Temperature Compensation

A combined MEMS thermal vacuum sensor with a wide pressure range

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