A Phase compensation method for MEMS quadruple mass gyroscope in zero bias drift

Liu, Mengxiang; Fan, Qi; Zhao, Jian; Su, Yan

doi:10.1109/jsen.2020.3026754

Cited by 4 publications

(2 citation statements)

References 19 publications

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“…The disadvantage of the above two methods is the amount of time needed to search for the extreme-point. A two-stage capacitor amplifier circuit as a front-end amplifier [ 22 ] was conducted in an MEMS Quadruple Mass Gyroscope to reduce the overall phase shift of the loop, which also validated that the demodulation phase has a dominant impact in zero bias drift. A modified double sideband extraction algorithm was presented based on the symmetry of double sideband modulation [ 23 ] to eliminate the disturbance of circuit phase delay in the drive mode and sense mode.…”

Section: Introductionmentioning

confidence: 99%

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

Liu

Qin

2022

Micromachines

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In this paper, an online compensation method of phase delay error based on a Phase-Frequency (P-F) characteristic has been proposed for MEMS Coriolis Vibratory Gyroscopes (CVGs). At first, the influences of phase delay were investigated in the drive and sense mode. The frequency response was acquired in the digital control system by collecting the demodulation value of drive displacement, which verified the existence and influence of the phase delay. In addition, based on the P-F characteristic, that is, when the phase shift of the nonresonant drive force through the resonator is almost 0° or 180°, the phase delay of the gyroscope is measured online by injecting a nonresonant reference signal into the drive-mode dynamics. After that, the phase delay is self-corrected by adjusting the demodulation phase angle without affecting the normal operation of the gyroscopes. The approach was validated with an MEMS dual-mass vibratory gyroscope under double-loop force-to-rebalance (in-phase FTR and quadrature FTR) closed-loop detection mode and implemented with FPGA. The measurement results showed that this scheme can detect and compensate phase delay to effectively eliminate the effect of the quadrature error. This technique reduces the zero rate output (ZRO) from −0.71°/s to −0.21°/s and bias stability (BS) from 23.30°/h to 4.49°/h, respectively. The temperature sensitivity of bias output from −20 °C to 40 °C has reached 0.003 °/s/°C.

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Section: Introductionmentioning

confidence: 99%

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

Liu

Qin

2022

Micromachines

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“…An interface circuit based on two-cascaded integrators is proposed for a tuning fork gyroscope in order to make the phase delay error of interface circuit almost independent of variation of circuit parameters at the gyroscope frequency [23]. Similarly, an interface circuit based on a cascaded capacitive transimpedance amplifier is also presented to optimize the phase response curve where the phase response area is moved from the cut-off frequency area to a smooth area, reducing the phase jitter [27]. The residual compensation error of circuit phase delay still exists and is temperature dependent.…”

Section: Introductionmentioning

confidence: 99%

Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error

Wu¹,

Zheng²,

Wang³

et al. 2021

J. Micromech. Microeng.

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This work analyses circuit phase delay for carrier-modulation MEMS capacitive gyroscopes. The temperature-dependent circuit phase delay is a major source of gyroscope output drift, which deteriorates the gyroscope bias instability (BI) and angle random walk (ARW). Effects of both drive-mode and sense-mode circuit phase delay on gyroscope performance when using different signal extraction architectures are analyzed in detail. The online suppression method which combines the so-called modified double sideband (MDSB) extraction architecture in the gyroscope drive mode and closed-loop force-rebalance loop in the sense mode can eliminate the impact of residual fluctuation error of circuit phase delay in real time. When drive-mode circuit phase delay equivalently varies from −20° to 20°, using MDSB decreases the fluctuation of the open-loop zero-rate output (ZRO) by 70% compared to using double sideband (DSB) and by 99.7% with respect to using single sideband (SSB). Meanwhile, improvement for the closed-loop ZRO using MDSB is 92.48% and 94% compared to cases using DSB and SSB, respectively. Furthermore, when the equivalent circuit phase delay of the sense-mode alters from −20° to 20°, ZRO variation for the gyroscope with force rebalanced sense loop and quadrature stiffness nulling loop decreases by 80% in contrast to the case with open loop, which demonstrates the effectiveness of online suppression for circuit phase delay of both the drive-mode and sense-mode. Using the online suppression method, the gyroscope has achieved a BI of 0.16° h−1 and ARW of 0.011° (√h)−1. Furthermore, using the MDSB in the drive mode obtains the best stability compared to using the DSB and SSB as the temperature changes.

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Loop Oscillation Analysis of MEMS Resonant Pressure Sensor Readout Circuit

Lu,

Wu,

Yin

et al. 2023

2023 IEEE 15th International Conference on ASIC (ASICON)

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A Phase compensation method for MEMS quadruple mass gyroscope in zero bias drift

Cited by 4 publications

References 19 publications

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

Online Compensation of Phase Delay Error Based on P-F Characteristic for MEMS Vibratory Gyroscopes

Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error

Loop Oscillation Analysis of MEMS Resonant Pressure Sensor Readout Circuit

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