“…In the field of silicon photonics, the microring-like stable planar structure (crucial for semiconductor processing) is a commonly employed WGM-type microcavity. Notably, efficient coupling-out of these trapped WGM cavity modes for out-of-plane or off-chip collection has encountered key challenges, , unlike in-plane coupling scenarios (on-chip collection). ,,− Although several nanophotonic microcavity architectures have been investigated to obtain WGMs spectrum in off-chip collection schemes, for example, III–V microcavity structures , and 2D materials, they either employ nonplanar geometries, require hybrid and complex integration or are not compatible with CMOS fabrication technology. Although extensive examination has been conducted on the photoluminescence (PL) in the context of SiN films and waveguides, − ,− the exploration of the resonant modes of SiN microcavity, specifically the detection of whispering gallery modes (WGMs), through the excitation and coupling of a quantum light source embedded in SiN material, has not been investigated to the best of our knowledge.…”