A photonic silicon waveguide gas sensor using evanescent-wave absorption

Ranacher, Christian; Carinthian, Cristina Consani; Hedenig, Ursula; Grille, Thomas; Lavchiev, Ventsislav; Jakoby, Bernhard

doi:10.1109/icsens.2016.7808688

Cited by 21 publications

(19 citation statements)

References 2 publications

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“…The results show that a concentration of 0.5% (or 5000 ppm) CO2 can be detected. This is a significant improvement of one order of magnitude, compared to previous work where silicon slab waveguides were used [7]. Even for 0.1% the change in intensity is visible but close to the noise level.…”

Section: Resultsmentioning

confidence: 60%

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Photonic Gas Sensor Using a Silicon Strip Waveguide

Ranacher

Tortschanoff

Consani

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:Sensing of gases is a promising area for applications of photonic systems operating in the mid-infrared spectral range. We present an infrared evanescent-field absorption gas sensor based on a silicon strip waveguide, which was specifically designed for CO2 sensing. We discuss finite element simulations that were used to design the strip waveguide and furthermore present experimental data of quantitative CO2 measurements with the devised structures. The first demonstrator device detects concentrations down to 5000 ppm CO2 which is the workplace exposure limit in most jurisdictions.

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Section: Resultsmentioning

confidence: 60%

“…The CO2 measurements were carried out using a custom test-bench which was described in [7]. For the quantitative gas measurements, the whole test chip was placed in a 3D printed gas cell (acrylate-type plastic) which was flushed with CO2/N2 mixtures at a total flow rate of 100 mL/min (see also Figure 1).…”

Section: Methodsmentioning

confidence: 99%

Photonic Gas Sensor Using a Silicon Strip Waveguide

Ranacher

Tortschanoff

Consani

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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“…A system of PhC holes on a Si slab has been developed to serve as a source for a Si slab waveguide. This system will be later adapted to an evanescent-field silicon waveguide platform for sensing CO2 gas; and therefore, it is designed to emit at a wavelength of 4.26 µm [11].…”

Section: System Under Studymentioning

confidence: 99%

“…However, these compounds are not compatible to be efficiently grown onto the silicon platform which make the device manufacturing complicated and expensive. In this work, a thermal source in a photonic crystal lattice filter is studied for an on-chip gas sensing application based on Si photonics [11,12]. Such a system is fully compatible with the routines of CMOS fabrication plants and can result in functional chips with a reduced price.…”

Section: Introductionmentioning

confidence: 99%

Narrow-Band Thermal Photonic Crystal Emitter for Mid-Infrared Applications

2018

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Mid-infrared (MIR) on-chip sensing on Si has been a progressive topic of research in the recent years due to excitation of vibrational and rotational bands specific to materials in this range and their immunity against visible light and electromagnetic interferences. For on-chip applications, integration of all the optical components including the MIR source is crucial. In this work, we introduce a slab photonic crystal (PhC) thermal source where the birthplace and the filtering of the photons occur in the same region. Due to the forbidden frequency bands and high density of states in the band edge, it provides electric efficiency and filtering performance.

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“…The devised sensor test structures are silicon strip waveguides on a silicon nitride-layer, deposited on SiO2, which can be fabricated in a standard MEMS process to provide a fully integrated CMOS compatible sensor, which is our ultimate goal [2,3].…”

Section: Introductionmentioning

confidence: 99%