A piezoelectric MEMS microphone optimizer platform

Fawzy, Ahmed; Magdy, Ahmed; Hossam, Aya

doi:10.1016/j.aej.2021.08.044

Cited by 9 publications

(7 citation statements)

References 38 publications

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“…2. These percentage of decrease is much less than the case A for the shear walls in model A is in the outer edge with the edge beam although model B the shear walls are in the inner core of the building as shown in Figure (1).…”

Section: Case A( With and Without Edge Marginal Beam )mentioning

confidence: 78%

“…A Thirty storeys building concrete structures is studied using different systems cases as moment resisting frame, shear wall and dual system of moment resisting frame and shear wall. The edge beams for the building structures is used to decrease the maximum displacements and drift for the high-rise structures [1]. A static and dynamic analysis using ETABS software [2] are used to monitor for the main parameters studied.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

The Effect of Edge Beams in The Static and Dynamic Seismic Analysis of High-Rise Building Structures

Fawzy

2024

ERJ. Engineering Research Journal

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The demand of high-rise building increases widely in many crowded cities as New York and east Asia and many other cities of high economic value as Dubai. The high increase in building height is accompanied with an increase of drift and maximum displacements for the structures subjected to seismic and wind load as well. In this study the moment resisting frame and shear wall and a combination of both are studied for the effect of seismic loading. The location of the moment resisting frames and the shear walls is an important parameter in this study. The edge beams for the building structures is used to decrease the maximum displacements and drift for the high-rise structures. A static and dynamic analysis using commercial software are used to monitor the main parameters studied. A comparison between the static and dynamic analysis is done according to the ASCE-7-10 and design according to the ACI 318-14. The study pointed that the maximum displacements and drift is more critical in the static analysis and the edge beams used in the model cases studied, showed a great reduction in drift and maximum displacement as well. The study also monitored that the shear wall length is a major factor in resisting lateral loading and decreasing the drift and displacement especially if the wall is of one unit length in the direction of loading. Dividing the wall length in the direction of loading affects much in resisting the drift and displacements. This study focuses on the high benefit of using edge beams in high-rise concrete structures.

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Section: Case A( With and Without Edge Marginal Beam )mentioning

confidence: 78%

Section: Introductionmentioning

confidence: 99%

The Effect of Edge Beams in The Static and Dynamic Seismic Analysis of High-Rise Building Structures

Fawzy

2024

ERJ. Engineering Research Journal

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“…are used to show the device's viability and response [7,8]. The simulation results are reasonably consistent when validated empirically [8][9][10][11][12][13][14]. When choosing the simulation's range, fabrication constraints should be taken into account.…”

Section: Introductionmentioning

confidence: 92%

Design and Optimization of Piezoelectric Diaphragm for Self-Powered Acoustic Sensor

Sawane,

Prasad

2023

Preprint

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A self-powered piezoelectric material-based sensor has miniaturization and mass production capabilities. The finite element analysis shows results prior to device fabrication, which discover potential defects in the design, improve sensor performance, and lead to cost-effective fabrication. This study reveals the trade-offs between sensitivity and frequency range of the proposed device and provides an optimized diaphragm design in terms of material choice and dimension. Regardless of the cavity and holes in the silicon substrate, the optimized design is applicable for any piezoelectric square shaped diaphragm-based acoustic sensor. The constraints of the MEMS fabrication technique are considered while selecting a parameter range for the diaphragm. The obtained results from COMSOL Multiphysics with diaphragm area 12.25 mm2, ZnO (2.5 µm), and silicon layer (5 µm) shows a resonance frequency of 39 kHz and sensitivity of 1.17 mV at 1 kHz of frequency, results in higher sensitivity with maximum feasible frequency range for optimized design.

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“…Many authors and companies have designed MEMS microphones primarily intended for audio-related applications [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. One of the limitations in increasing the microphone sensitivity is due to difficulties in controlling the residual stress of the diaphragm used in the MEMS transducer microphone.…”

Section: Introductionmentioning

confidence: 99%

Simulation of Piezoelectric Transducer Microphone Diaphragm Based on Different Materials

Mohd Hafiz Ismail,

Wen Jie Koh,

Bibi Nadia Taib

et al. 2024

IJNeaM

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Piezoelectric microphone which utilizes MEMS technology is a type of transducer that converts an input acoustic signal into an output electrical signal. The characteristics of the microphone diaphragm such as the diaphragm design features and the type of piezoelectric materials used will affect the performance of the microphone in terms of sensitivity. It is hard to control the stress of the diaphragm used in the MEMS transducer microphone. A modification of the diaphragm is done in this project to reduce the residual stress of the piezoelectric transducer. In addition, finite element analysis namely structural, modal and harmonic were carried out using Ansys 15.0 to simulate the mechanical and dynamic behaviour of the microphone diaphragm. Two types of diaphragm structure were designed, namely square and circular, while three types of piezoelectric material which are AlN, PZT and ZnO were used as the diaphragm material. The structural analysis findings of the diaphragm subjected to 1 Pa pressure revealed that the circular diaphragm made of AlN material exhibited the highest stress, reaching 43.05 GPa, surpassing the stresses observed in the other two materials. On the contrary, the square diaphragm composed of PZT material demonstrated the lowest stress, with only 1.55 GPa. In terms of resonance frequency, the circular AlN diaphragm achieved the highest resonant frequency, reaching 449.84 kHz, whereas the square PZT diaphragm exhibited the lowest frequency at 200.25 kHz. In general, the circular diaphragm design consistently yielded higher first resonant frequencies compared to the square design.The results show that the circular diaphragm with AlN piezoelectric materials is the ideal diaphragm in the microphone because of the highest stress generated and the first resonant frequency. The stress is related to the sensitivity of a microphone while the high resonant frequency can lead to the better optimization of signal to noise ratio control.

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A piezoelectric MEMS microphone optimizer platform

Cited by 9 publications

References 38 publications

The Effect of Edge Beams in The Static and Dynamic Seismic Analysis of High-Rise Building Structures

The Effect of Edge Beams in The Static and Dynamic Seismic Analysis of High-Rise Building Structures

Design and Optimization of Piezoelectric Diaphragm for Self-Powered Acoustic Sensor

Simulation of Piezoelectric Transducer Microphone Diaphragm Based on Different Materials

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