2010
DOI: 10.1088/0960-1317/20/9/095033
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A planar PDMS micropump using in-contact minimized-leakage check valves

Abstract: We present a micropump with a simple planar design featuring compliant in-contact check valves in a single layer, which allows for a simple structure and easy system integration. The micropump, based on poly(dimethylsiloxane) (PDMS), primarily consists of a pneumatically driven thin membrane, a pump chamber, and two in-plane check valves. The pair of check valves is based on an in-contact flap–stopper configuration and is able to minimize leakage flow, greatly enhancing the reliability and performance of the m… Show more

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Cited by 36 publications
(29 citation statements)
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“…Pressurized nitrogen was used to drive DI water through the check valve in either forward or reverse direction, while the flow rate through the valve was obtained from the timed movement of the water meniscus in a plastic tubing connected to the exit end of the microchannel [24]. …”
Section: Methodsmentioning
confidence: 99%
“…Pressurized nitrogen was used to drive DI water through the check valve in either forward or reverse direction, while the flow rate through the valve was obtained from the timed movement of the water meniscus in a plastic tubing connected to the exit end of the microchannel [24]. …”
Section: Methodsmentioning
confidence: 99%
“…Micropumps are devices that can control and manipulate the flow of minute fluids volumes and their typical output flow rate varies in the range µL/min to mL/min [1,2]. Fabrication of such devices is of special interest in microfluidics research for medical application and has offered scope for industrial product integration in recent years.…”
Section: Introductionmentioning
confidence: 99%
“…Pan et al, studied PDMS membrane micropump with two one-way balls check valves for micro-fluidic applications where maximum flow rate of 774 μLmin −1 for 13 mW was observed and 10-turn planar coil pumping rate was 1 μLmin −1 for water [5]. Ni et al worked on PDMS with pneumatic actuation [1]. The micropump can generate maximum flow rate of 41μLmin −1 at 25kPa backpressure [1].…”
Section: Introductionmentioning
confidence: 99%
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“…In micropumps of the former type, a continuous movement of the fluid is induced by means of electrohydrodynamic (EHD), electrochemical, magnetohydrodynamic (MHD), electrophoretic, electroosmotic, or impedance driving forces [27]. By contrast, in reciprocating displacement micropumps, the fluid is driven peristaltically by applying an oscillatory or rotational movement to a series of (typically) three stationary diaphragms [814]. Reciprocating micropumps are typically actuated using piezoelectric [15,16], thermopneumatic [10,11,17], pneumatic [12–14,18], electromagnetic [19], or external actuation [20,21] techniques.…”
Section: Introductionmentioning
confidence: 99%