“…In micropumps of the former type, a continuous movement of the fluid is induced by means of electrohydrodynamic (EHD), electrochemical, magnetohydrodynamic (MHD), electrophoretic, electroosmotic, or impedance driving forces [2–7]. By contrast, in reciprocating displacement micropumps, the fluid is driven peristaltically by applying an oscillatory or rotational movement to a series of (typically) three stationary diaphragms [8–14]. Reciprocating micropumps are typically actuated using piezoelectric [15,16], thermopneumatic [10,11,17], pneumatic [12–14,18], electromagnetic [19], or external actuation [20,21] techniques.…”