2004
DOI: 10.1007/s10404-004-0007-6
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A PMMA valveless micropump using electromagnetic actuation

Abstract: We have fabricated and characterized a polymethylmethacrylate (PMMA) valveless micropump. The pump consists of two diffuser elements and a polydimethylsiloxane (PDMS) membrane with an integrated composite magnet made of NdFeB magnetic powder. A large-stroke membrane deflection ($200 lm) is obtained using external actuation by an electromagnet. We present a detailed analysis of the magnetic actuation force and the flow rate of the micropump. Water is pumped at flow rates of up to 400 ll/min and backpressures of… Show more

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Cited by 160 publications
(106 citation statements)
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“…For reciprocating micropumps, magnetic actuation methods have been proposed [7,8] and plastic and glass materials have become the preferred choice [3]. In particular, glass is a very promising material for LOC applications, since it is chemically inert and sterilizable at high temperature.…”
Section: Introductionmentioning
confidence: 99%
“…For reciprocating micropumps, magnetic actuation methods have been proposed [7,8] and plastic and glass materials have become the preferred choice [3]. In particular, glass is a very promising material for LOC applications, since it is chemically inert and sterilizable at high temperature.…”
Section: Introductionmentioning
confidence: 99%
“…An electromagetic actuated polymethylmethacrylate (PMMA) valveless micropump was fabricated by standard micromachining techniques. 51 The micropump was a three-dimensional structure and consisted of two diffuser elements located at the inlet and outlet of the pump chamber. PDMS membrane with an integrated magnet made of NdFeB (neodymium, iron, and boron) magnetic powder was bonded to the pump chamber for actuation.…”
Section: Mechanical Approachmentioning
confidence: 99%
“…Micro-pumps are smaller than conventional fans and consume less power. They can be divided into the following types: electromagnetic [3,4], piezoelectric [5][6][7], shape memory alloy [8], electrostatic [9], thermo-pneumatic [10], and dynamic, which are typically represented by electro-hydrodynamic [11] and magneto-hydrodynamic [12,13] pumps. Electromagnetic and piezoelectric devices are often used as actuators in commercial products.…”
Section: Introductionmentioning
confidence: 99%