X-Ray Spectroscopy 2012
DOI: 10.5772/29640
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A Practical Application of X-Ray Spectroscopy in Ti-Al-N and Cr-Al-N Thin Films

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Cited by 12 publications
(21 citation statements)
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“…The XPS literature spectra of TiAlN reported a nitrogen-(Ti,Al) peak ranging between 396.4 and 398.6 eV. This is consistent with the formation of both N-Ti and N-Al bonds that show peaks placed at 396.7–398.0 eV and at 396.8–398.6 eV, respectively [40,41,43]. The differences found by different authors regarding the N-Ti and N-Al BEs have been attributed to a variation of nitride stoichiometry as well as to oxygen contamination [42,45].…”
Section: Resultssupporting
confidence: 54%
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“…The XPS literature spectra of TiAlN reported a nitrogen-(Ti,Al) peak ranging between 396.4 and 398.6 eV. This is consistent with the formation of both N-Ti and N-Al bonds that show peaks placed at 396.7–398.0 eV and at 396.8–398.6 eV, respectively [40,41,43]. The differences found by different authors regarding the N-Ti and N-Al BEs have been attributed to a variation of nitride stoichiometry as well as to oxygen contamination [42,45].…”
Section: Resultssupporting
confidence: 54%
“…Moreover, it is well known that magnetron sputtering based technologies can cause coating texture. In particular, (220) texture was already reported in the literature [ 40 , 41 , 42 ]. The burner rig test carried out at 850 °C or at 950 °C did not result in the appearance of oxide peaks in the XRD patterns, probably because a very thin and not well crystallized oxide layer forms under these conditions.…”
Section: Resultsmentioning
confidence: 91%
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