A precision gas flowmeter for vacuum metrology

Jousten, Karl; Messer, G.; Wandrey, D

doi:10.1016/0042-207x(93)90362-e

Cited by 48 publications

(39 citation statements)

References 6 publications

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“…Jousten [12] s Calibrated bellows 12 5 Â 10 À 6 0.05 0.15 Jitschin [13] s Pistonþ lubricated o-rings 25 5 Â 10 À 4 50 0.1 Li [14] s/r Pistonþ bellows þ oil-filled cylinder 10, 25 5 Â 10 À 6 13 2. Jousten [15] s Calibrated bellows 12 5 Â 10 À 7 13 0.2 Jousten [16] s Calibrated bellows 12 5 Â 10 À 7 13 0.14 Calcatelli [17] s Pistonþ cylinderþ custom PTFE seal 5, 20 1 Â 10 À 5 0.7 0.2 Berg [18] s/r Pistonþ bellows þ oil-filled cylinder 102 1 Â 10 À 1 270 0.02 Cignolo [19] s/r Pistonþ lubricated o-ring 120 9 Â 10 À 2 1900 0.01 Kramer [20] s/r Double piston 16 1 Â 10 À 3 1.3 0.03 Cheng [21] s Pistonþ bellows þ oil-filled cylinder ?…”

Section: Reference S/r Typementioning

confidence: 99%

“…Its chief disadvantage is that the bellows volume V(x) must be calibrated as a function of its linear displacement x. Jousten et al [12] found that V(x) was more linear for a formed bellows than for a welded diaphragm bellows, although Gronych et al [22] later were able to use a welded diaphragm bellows despite its nonlinearity. Most of the devices in Table 1 were not flow receivers that measured an unknown flow directly but instead were flow sources that produced an accurately known gas flow.…”

Section: Introductionmentioning

confidence: 98%

“…The third type of flow standard, calibrated bellows [12,15,16,22], also has no sliding seal, and it eliminates the complications due to the oil by driving the bellows directly. Its chief disadvantage is that the bellows volume V(x) must be calibrated as a function of its linear displacement x. Jousten et al [12] found that V(x) was more linear for a formed bellows than for a welded diaphragm bellows, although Gronych et al [22] later were able to use a welded diaphragm bellows despite its nonlinearity.…”

Section: Introductionmentioning

confidence: 99%

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Constant pressure primary flow standard for gas flows from 0.01cm3/min to 100cm3/min (0.007–74μmol/s)

Berg

Gooding

Vest

2014

Flow Measurement and Instrumentation

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Section: Reference S/r Typementioning

confidence: 99%

Section: Introductionmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Constant pressure primary flow standard for gas flows from 0.01cm3/min to 100cm3/min (0.007–74μmol/s)

Berg

Gooding

Vest

2014

Flow Measurement and Instrumentation

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“…It is also repeated for various Seff. The residual reading Po is given by (5) where ppump is the ultimate pressure of the vacuum system downstream of the valve, and gout the total outgassing rate upstream, which is assumed to be independent of Seff in contrary to Malev's theory. By fitting the experimental data to equation (5), both ppump and qout can be obtained.…”

Section: Measuring Of Outgassing Ratesmentioning

confidence: 99%

Calibration of Total Pressure Gauges in the UHV and XHV Regions.

Jousten

1994

SHINKU

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When total pressures decrease to the XHV region, measurements with ionization gauges become increasingly sensitive to disturbances such as electron-or photonstimulated desorption, outgassing of the gauges, and production of secondary electrons by X-rays. Therefore, it is very important to have a reliable pressure scale also in the XHV region. The laboratory for vacuum physics at the Physikalisch-Technische Bundesanstalt (PTB) in Germany provides a calibration system with molecular beam expansion for pressures down to 10-10 Pa and is building a new calibration system based on continuous expansion for a lower calibration limit in the 10-11 Pa decade. The advantages and disadvantages of the two systems will be discussed and calibrations with the molecular beam system will be presented. For determining the outgassing rate of the vacuum chamber of the new calibration system, a new method was applied and compared to the classical methods, the throughput method and the pressure rise method. In particular it was checked whether the outgassing rate depends on the pumping speed applied to the chamber as proposed in a theory by Maley.

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“…Other applications include the field of aerosols [32], chemical vapor deposition [33] and vacuum metrology [34]. More information on applications and various aspects of rarefied gas dynamics may be found in [35,36,37].…”

Section: Introductionmentioning

confidence: 99%

Simulation of transport phenomena in conditions far from thermodynamic equilibrium via kinetic theory with applications in vacuum technology and MEMS

Πανταζής¹

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The approval of the current dissertation by the Department of Mechanical Engineering of the University of Thessaly does not imply acceptance of the author's opinions (Law 5343/32 number 202 paragraph 2). Also, the views and opinions expressed herein do not necessarily reflect those of the European Commission. There are several other people who I feel that have contributed in the writing of this dissertation.The most important contributions, along with several helpful conversations, were made by Prof. F.Sharipov, who provided the basic concept of the channel end effect study, and Dr. Chr. Day along with the KIT personnel, who briefly introduced me in the world of experimental rarefied gas dynamics. It was also a priviledge to discuss and work for a brief period of time with Prof. A. Grecos, who tirelessly discussed with me on various subjects of statistical mechanics. Financial support for this Ph.D. has been provided by the Euratom Association -Hellenic Republic, to which I am deeply indepted. Also, partial support for conference mobility expenses has been received from the GASMEMS Marie Curie programme. In this work, non-equilibrium transport phenomena have been examined via the kinetic theory of gases. The behaviour of the gas in low pressure conditions or in low-dimensionality systems can not be captured by the usual Navier-Stokes formulation, in conjunction with the constitutive laws of Newton-Fourier-Fick. The limited number of intermolecular collisions results in departure from equilibrium and the particulate nature of the gas must be taken into account, greatly increasing the computational effort.The problem is described by the integro-differential Boltzmann equation, which is used to determine the distribution of particles in physical and molecular velocity space, as well as in time.There are difficulties associated with the seven-dimensional nature of the distribution function, as well as with the complexity of the collision term, which is usually substituted by an appropriate model.The most widely used and successful numerical methodologies, the Discrete Velocity Method (DVM) and the Direct Simulation Monte Carlo (DSMC), are applied here in the whole range of the Knudsen number. It is important to employ approaches based on kinetic theory, since these are the only ones which are valid for any rarefaction level.In this work, several problems including non-equilibrium phenomena are considered. The interaction of gases with solid surfaces is considered for several problems according to the CercignaniLampis boundary conditions. The non-linear form of this scattering kernel, which had not been pre- viously used in the literature, is applied on the problem of heat transfer between parallel plates and coaxial cylinders. Its linearized form has also been employed for both flow and heat transfer problems and a comparison with relevant experiments has lead to surface characterization with respect to argon and helium flows.Non-linear heat conduction phenomena are also studied for the parallel plates and coaxial c...

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A precision gas flowmeter for vacuum metrology

Cited by 48 publications

References 6 publications

Constant pressure primary flow standard for gas flows from 0.01cm3/min to 100cm3/min (0.007–74μmol/s)

Constant pressure primary flow standard for gas flows from 0.01cm3/min to 100cm3/min (0.007–74μmol/s)

Calibration of Total Pressure Gauges in the UHV and XHV Regions.

Simulation of transport phenomena in conditions far from thermodynamic equilibrium via kinetic theory with applications in vacuum technology and MEMS

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