“…To fulfill the fast-growing demand for wearable electronics in daily life for continuous respiratory monitoring, it is important to develop ultra-flexible, lightweight, and comfortable respiratory monitoring sensors. In recent years, there have been many flexible relative humidity sensors reported on substrates such as polyethylene terephthalate (PET/0.2-0.7 mm) [17][18][19][20][21], polyester (PE/0.1-0.5 mm) [20], polyimide (PI/0.125 mm) [21][22][23], polyethylene napthalate (PEN/50 µm) [21,24], poly carbonate (PC) [25], epoxy [21,26], cellulose paper [21,27,28], and textiles [29,30]. A comparison of these works with the key parameters (sensing material, substrate, deposition method, annealing temperature, dynamic range of sensor, and response and response/recovery time) is shown in Table S1 [17][18][19][22][23][24]27,28,30].…”