A Procedure for Cross Sectioning Specific Semiconductor Devices for Both SEM and TEM Analysis

Abstract

The procedures described in this paper allow both SEM and TEM analysis to be performed on the same, device specific, semiconductor cross section. In order to accomplish this, a number of tools and fixtures have been constructed that allow the user to polish into the sample to a predetermined plane-of-polish, bisecting the device or feature of interest for SEM analysis. After SEM examination, the specimen is prepared for TEM analysis by first affixing a grid to the just-examined surface, inverting the specimen and parallel-polishing the backside of the specimen until the specimen's total thickness is in the 0.5 to 1.0μm range using the described tools. A subsequent one to ten minute ion milling step cleans the specimen. A very considerable positive side-effectof this method is the nearelimination of artifacts arisingfrom the use of strong chemicals and lengthy ion milling. The method has been extended to the preparation of plan-view device samples and non-semiconductor specimens.

Analysis of local deformations in heterostructures containing short period superlattices by high-resolution transmission electron microscopy

“…(1-10) TEM cross-sections were prepared using the tripod mechanical polisher method [14] to obtain 1-2 microns thick samples. Afterwards, electron transparence is reached by a few minutes ion thinning using a Precise Ion Polishing System.…”

Nanoscale analysis of a Co-SrTiO3 interface in a Magnetic tunnel junction

“…Cross-sectional samples for TEM have been thinned by mechanical polishing, using a tripod polisher to about 5 to 10 p!m, then ion-milled using a Gatan-PIPS ion miller (Ar, 2.5keV, 6°) until electron transparent [10]. Transmission electron microscopy has been carried out using a Topcon EM002B electron microscope, operated at 200kV (0.19 rim spatial resolution).…”

Crystallographic Texture of Induction-Welded and Heat-Treated Pipeline Steel

“…Pipelines steels are normally hot-rolled at elevated temperatures in the austenitic condition followed by accelerated cooling [8,9]. Because of the low solute-content in the steel, the first phase to form in spite of the rapid cooling is allotriomophic ferrite (α) which enriches the remaining austenite with carbon; the later eventually transforms into fine pearlite.…”