A Proposal for an Optical MEMS Accelerometer Relied on Wavelength Modulation With One Dimensional Photonic Crystal

Sheikhaleh, Arash; Abedi, Kambiz; Jafari, Kian

doi:10.1109/jlt.2016.2597539

Cited by 37 publications

(26 citation statements)

References 23 publications

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“…With a high-resolution optical spectrum analyzer (0.01 picometer), the resolution of the ROTE senor can reach 1 × 10 −3 g. Although the sensitivity is a key parameter for the accelerometer, the sensitivity and the acceleration measurement range always should be balanced for the specific application. According to the simulation results, the proposed accelerometer can reach 9 pm/g with measurement range of ±130 g, which is comparable with that of the Fabry-Pérot-based accelerometer (90 nm/g, ±0.263 g) [5], the photonic crystal accelerometer (1.17 nm/g, ±22 g) [25] and the optical microring resonator accelerometer (31 pm/g, ±7 g) [26]. The sensor we proposed has the lowest sensitivity but maximum measurement range among all these optical accelerometers.…”

Section: Theoretical Analysis and Simulationmentioning

confidence: 63%

Theoretical Analysis of an Optical Accelerometer Based on Resonant Optical Tunneling Effect

Jian

Wei

Guo

et al. 2017

Sensors

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Acceleration is a significant parameter for monitoring the status of a given objects. This paper presents a novel linear acceleration sensor that functions via a unique physical mechanism, the resonant optical tunneling effect (ROTE). The accelerometer consists of a fixed frame, two elastic cantilevers, and a major cylindrical mass comprised of a resonant cavity that is separated by two air tunneling gaps in the middle. The performance of the proposed sensor was analyzed with a simplified mathematical model, and simulated using finite element modeling. The simulation results showed that the optical Q factor and the sensitivity of the accelerometer reach up to 8.857 × 10 7 and 9 pm/g, respectively. The linear measurement range of the device is ±130 g. The work bandwidth obtained is located in 10-1500 Hz. The results of this study provide useful guidelines to improve measurement range and resolution of integrated optical acceleration sensors.

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Section: Theoretical Analysis and Simulationmentioning

confidence: 63%

Theoretical Analysis of an Optical Accelerometer Based on Resonant Optical Tunneling Effect

Jian

Wei

Guo

et al. 2017

Sensors

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“…In recent years, photonic sensors have been widely studied and fabricated because of the increasing demand for sensing applications in the health care, food quality, control defense, security, automobiles, aerospace, and so on. Accelerometer sensors are widely used in many electronic devices, as well as vehicle vibration control, aerospace, and navigation systems [58][59][60]. Many manufacturers have been commercialized as high-performance microelectromechanical system (MEMS) inertial sensors for many applications [61][62][63][64][65].…”

Section: Photonic Sensorsmentioning

confidence: 99%

A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers

et al. 2020

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In view of the large scientific and technical interest in the MEMS accelerometer sensor and the limitations of capacitive, resistive piezo, and piezoelectric methods, we focus on the measurement of the seismic mass displacement using a novel design of the all-optical sensor (AOS). The proposed AOS consists of two waveguides and a ring resonator in a two-dimensional rod-based photonic crystal (PhC) microstructure, and a holder which connects the central rod of a nanocavity to a proof mass. The photonic band structure of the AOS is calculated with the plane-wave expansion approach for TE and TM polarization modes, and the light wave propagation inside the sensor is analyzed by solving Maxwell’s equations using the finite-difference time-domain method. The results of our simulations demonstrate that the fundamental PhC has a free spectral range of about 730 nm covering the optical communication wavelength-bands. Simulations also show that the AOS has the resonant peak of 0.8 at 1.644µm, quality factor of 3288, full width at half maximum of 0.5nm, and figure of merit of 0.97. Furthermore, for the maximum 200nm nanocavity displacements in the x- or y-direction, the resonant wavelengths shift to 1.618µm and 1.547µm, respectively. We also calculate all characteristics of the nanocavity displacement in positive and negative directions of the x-axis and y-axis. The small area of 104.35 µm2 and short propagation time of the AOS make it an interesting sensor for various applications, especially in the vehicle navigation systems and aviation safety tools.

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“…In this section, a comparative study is carried out between the proposed graphene-based optical MEMS accelerometer and several recently developed optical MEMS accelerometers based on intensity modulation [15,27] and wavelength modulation [12].…”

Section: Studymentioning

confidence: 99%

“…The basic principle of operation of a MEMS accelerometer is to measure the proof-mass displacement caused by the applied acceleration. While all of the above-mentioned techniques may encounter several issues, the optical sensing approach may introduce several advantages, such as greater immunity against EMI, higher thermal stability, better performance, and improved sensitivity compared to other existing sensing methods [12]. Each sensing technology not only provides several advantages but also suffers from some drawbacks.…”

Section: Introductionmentioning

confidence: 99%

“…However, capacitive MEMS accelerometers have some drawbacks, such as the effect of the existing parasitic capacitance, curling effect, low frequency range, and high sensitivity to electromagnetic interference (EMI). While all of the above-mentioned techniques may encounter several issues, the optical sensing approach may introduce several advantages, such as greater immunity against EMI, higher thermal stability, better performance, and improved sensitivity compared to other existing sensing methods [12]. These advantages make the approach a suitable alternative for several applications where high sensitivity, wide bandwidth, and good reliability are crucial.…”

Section: Introductionmentioning

confidence: 99%

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Novel graphene-based optical MEMS accelerometer dependent on intensity modulation

2018

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This paper proposes a novel graphene‐based optical microelectromechanical systems MEMS accelerometer that is dependent on the intensity modulation and optical properties of graphene. The designed sensing system includes a multilayer graphene finger, a laser diode (LD) light source, a photodiode, and integrated optical waveguides. The proposed accelerometer provides several advantages, such as negligible cross‐axis sensitivity, appropriate linearity behavior in the operation range, a relatively broad measurement range, and a significantly wider bandwidth when compared with other important contributions in the literature. Furthermore, the functional characteristics of the proposed device are designed analytically, and are then confirmed using numerical methods. Based on the simulation results, the functional characteristics are as follows: a mechanical sensitivity of 1,019 nm/g, an optical sensitivity of 145.7 %/g, a resonance frequency of 15,553 Hz, a bandwidth of 7 kHz, and a measurement range of ±10 g. Owing to the obtained functional characteristics, the proposed device is suitable for several applications in which high sensitivity and wide bandwidth are required simultaneously.

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A Proposal for an Optical MEMS Accelerometer Relied on Wavelength Modulation With One Dimensional Photonic Crystal

Cited by 37 publications

References 23 publications

Theoretical Analysis of an Optical Accelerometer Based on Resonant Optical Tunneling Effect

Theoretical Analysis of an Optical Accelerometer Based on Resonant Optical Tunneling Effect

A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers

Novel graphene-based optical MEMS accelerometer dependent on intensity modulation

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