Micro metal parts are usually produced in large lot sizes at high production rates. In order to achieve sufficient product quality, excessive tool wear has to be avoided. In the micro range, so-called scaling effects and their influence on tool wear in micro forming have not been investigated so far. For the investigation, tests in micro deep drawing were carried out with metal sheets (s < 50 μm) of pure aluminum Al99.5, a copper alloy E-Cu58 and stainless steel 1.4301. The failure mechanisms of the micro cups produced were identified as bottom fracture and cup wall damage, and tool wear was measured and characterized with optical measurements and EDX analyses. Moreover, micro cups can be produced by DLC-and PVD-coated tools in a dry forming process. To investigate the wear behavior in a continuous process, a forming tool was developed with an integrated blanking and deep drawing die. The tool wear was measured optically, and the wear mechanisms could be identified in a combined micro and deep drawing process. As a result, the tool could be modified by a manufacturing in selective laser melting and the tool life increased by 290%. Furthermore, a method for tool wear examination in long-term tests was developed. In lateral micro upsetting, the tool wear history can be examined by analyzing the formed product. Several tool materials and coatings were tested with up to 500,000 strokes.