A queueing network model for semiconductor manufacturing

Cluster Tools With Chamber Revisiting—Modeling and Analysis Using Timed Petri Nets

“…The solution follows the decomposition-based approximation approach, so each of dozens of nodes in the network is analyzed separately, with a set of renewal input processes capturing the interdependence among the nodes. Although [7] reports good conformance of obtained estimates with the results of simulation studies, the development of the queueing network model relied heavily on an existing simulation model developed earlier by IBM, and extensively validated and tested against actual IBM semiconductor lines. [7] concludes that a combination of queueing network models and simulation techniques is a more promising approach to performance prediction of semiconductor fabs.…”

“…Although [7] reports good conformance of obtained estimates with the results of simulation studies, the development of the queueing network model relied heavily on an existing simulation model developed earlier by IBM, and extensively validated and tested against actual IBM semiconductor lines. [7] concludes that a combination of queueing network models and simulation techniques is a more promising approach to performance prediction of semiconductor fabs. A general overview of application of queueing network models to modeling and performance prediction of wafer fabs, with some directions for future research, is given in [19].…”

“…An open queueing network model for rapid performance analysis of semiconductor fabs is described in [7]. While the use of queueing models for performance evaluation of manufacturing systems is not new, the approach presented in [7] differs from others in the detailed models in which different tool groups are represented and in the way in which the effects of wafer rework and scrap are characterized. The solution follows the decomposition-based approximation approach, so each of dozens of nodes in the network is analyzed separately, with a set of renewal input processes capturing the interdependence among the nodes.…”

Reducing throughput time during product design

“…Connors et al [9] modeled semiconductor wafer fabrication facilities using a sophisticated queuing network model to analyze these facilities quickly by avoiding the effort and time needed to create and run simulation models. (These models are similar to the ones used here.)…”

Configuration Design of Complex Integrated Manufacturing Systems

“…(3). An integrated system can be modelled as a queueing network and the decomposition approach that separates the analysis of the network into node and network levels has become a standard and well-accepted technique [21]. By this approach, each station is analysed separately and characterised by the first two moments of its interarrival times at the node level.…”