A Radial-flux Permanent Magnet Micromotor with 3D Solenoid Iron-core MEMS In-chip Coils of High Aspect Ratio

Tao, Zhi; Sun, Jiamian; Li, Haiwang; Huang, Yujia; Li, Hanqing; Xu, Tiantong; Wu, Hanxiao

doi:10.1109/led.2020.2998356

Cited by 8 publications

(4 citation statements)

References 24 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The technology of micro-electro-mechanical systems (MEMS) has extended from a simplified surface structure as the core design in the initial stage to a complex design with a three-dimensional spatial structure and multiple structural materials; polymer microstructures with functional properties are one of the key microstructures to realize function expansion [ 1 , 2 , 3 , 4 , 5 ]. The development of diversified polymer structures means that the structure can obtain more available applications.…”

Section: Introductionmentioning

confidence: 99%

Preparation of Highly Stable Polymer Microstructure with Enhanced Adhesion Strength by Pushpin-like Nano/Microstructure Array

Ding

et al. 2023

Polymers

View full text Add to dashboard Cite

This polymer microstructure expands more available application, which is a milestone for the development of micro-electro-mechanical system devices towards intelligence and multifunction. Poor interface bonding between the polymer and Si or metal is a particular problem, which restricts the application and promotion of polymer materials. In this study, a transition strengthening layer is proposed to obtain a highly stable polymer microstructure by enhancing the interfacial adhesion strength. The transition strengthening layer is activated by a pushpin-like nano/microstructure array with micromachining technology. Given its good graphical qualities and compatibility, epoxy negative photoresist SU-8 is applied to evaluate the strengthened capabilities of the pushpin-like nano/microstructure array. The microstructure of SU-8 is prepared by the same processes, and then the adhesion strength between the SU-8 microstructure and various activated substrates is tested by the thrust tester. It was determined that SU-8 with an activated pushpin-like microstructure array possessed a highly stable adhesion ability, and its adhesion strength increased from 6.51 MPa to 15.42 MPa. With its ultrahigh stable adhesion ability, it has been applied in fabricating three typical microstructures (hollow square microstructure, gradually increasing adjacent periodic microstructure, and slender strip microstructures) and large-area SU-8 microstructures to evaluate the feasibility of the transition strengthening layer and repeatability and universality of the microfabrication processes. The drifting and gluing phenomenon are avoided by this method compared with the traditional design. The proposed pushpin-like nano/microstructure array is promising in enhancing the stability of polymer microstructures with a substrate.

show abstract

Section: Introductionmentioning

confidence: 99%

Preparation of Highly Stable Polymer Microstructure with Enhanced Adhesion Strength by Pushpin-like Nano/Microstructure Array

Ding

et al. 2023

Polymers

View full text Add to dashboard Cite

show abstract

“…The outstanding advantage of electrostatic motors is that the levitation structure can reduce the friction force during rotation and increase the output torque [7][8][9]. In particular, the research on miniaturised electrostatic motors is developing rapidly to meet the demand for microelectromechanical systems (MEMS) [10,11]. However, the structure of existing electrostatic motors is complicated.…”

Section: Introductionmentioning

confidence: 99%

An electrostatic micromotor based on electrets

Chen

Zhang

Fan

et al. 2023

IET Nanodielectrics

View full text Add to dashboard Cite

The authors report a novel electret‐based miniature electrostatic motor with an electret film as the stator and a metal electrode as the rotor. A particular commutator is used to transform the polarity of the metal electrode. When the size of the electret‐based electrostatic motor (EEM) is 42 × 44 × 15 mm3, the maximum power consumption is only 5.4 mW. The rotation speed of the EEM increases with the increase of the supply voltage, and the maximum rotation speed can reach up to 2864 rpm. Powered by two nickel‐hydride batteries with a rated capacity of 1700 mAh, the EEM can drive a fan with a diameter of 40 mm to rotate continuously for 18 h. The EEM has the characteristics of low power consumption and convenient fabrication. Experimental results show that the EEM demonstrates high reliability and has potential applications in micro‐electromechanical systems.

show abstract

“…The electro-permanent magnet (EPM) technology invented by Tecnomagnete S.p.A. in the 1970s solves the above problems and has been used in many industrial applications, such as magnetorheological valve proposed by Leps, 13 climbing robots proposed by Peter, 14 micromotor with 3D iron-core MEMS in-chip proposed by Zhi, 15 and other related applications. Furthermore, Qin 16 proposed a novel blank holder technique based on EPM technology.…”

Section: Introductionmentioning

confidence: 99%

An efficient, safe, and energy-saving saddle for pressure vessel based on electro-permanent magnet technology

Zhang

Chen

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part E:

View full text Add to dashboard Cite

In this paper, a novel magnetic transport saddle based on the electro-permanent magnet (EPM) technology is proposed. A strong and stable magnetic force can be generated by passing only a momentary current during loading and unloading since the magnetic force is provided by the internal permanent magnet, not the electromagnet. The EPM system is convenient to control and has low energy consumption. This research commenced with a preliminary design of the magnetic circuit structure and circuit structure. The feasibility of this magnetic circuit structure is verified by theoretical derivation and magnetic field simulation, and the factors influencing the magnetic force are further investigated. Subsequently, transient thermal analysis was performed for the extreme case of continuous magnetization and demagnetization. Then, a series of experiments such as electrical circuit, magnetic field, and tensile test were performed for the EPM chuck. Based on the magnetic element, the magnetic transport saddle is designed and the magnetic field simulation is performed for the magnetization state. In addition, when the wall thickness of the transport cylinder is too thin and the magnetic force is insufficient, this paper proposes a solution to increase the cushions inside the transported equipment. Finally, the energy-saving performance of the magnetic transport saddle based on the EPM technology is calculated.

show abstract

A Radial-flux Permanent Magnet Micromotor with 3D Solenoid Iron-core MEMS In-chip Coils of High Aspect Ratio

Cited by 8 publications

References 24 publications

Preparation of Highly Stable Polymer Microstructure with Enhanced Adhesion Strength by Pushpin-like Nano/Microstructure Array

Preparation of Highly Stable Polymer Microstructure with Enhanced Adhesion Strength by Pushpin-like Nano/Microstructure Array

An electrostatic micromotor based on electrets

An efficient, safe, and energy-saving saddle for pressure vessel based on electro-permanent magnet technology

Contact Info

Product

Resources

About