“…Various types of micro plasmas have been recently described, such as, CCP, 7-9 MIP, 4,10,11 ICP, 12,13 and others, which can detect halogens. However, argon plasmas have insufficient energy to excite halogens, 14 and thus, helium has been used instead due to the higher excitation and ionization energy. The thermal properties of plasmas can be estimated using several techniques, such as, mass spectrometry, Langmuir probe, and optical techniques.…”