2011
DOI: 10.1039/c0lc00470g
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A rapid and economical method for profiling feature heights during microfabrication

Abstract: Quality control is an important and integral part to any microfabrication process. While the widths of features often can be easily assessed by light microscopy, the heights of the fabricated structures are more difficult to determine. Here, we present a rapid, accurate, and low-cost method to measure the heights of microfabricated structures during and after the fabrication process. This technique is based on white-light interferometry, which offers accuracy on the submicrometre scale.

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Cited by 12 publications
(10 citation statements)
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“…After curing, non-exposed SU-8 was dissolved in PGMEA and the wafer was cleaned with isopropyl alcohol and hard baked for 10 minutes at 155 °C. The height of the positive features in the master was measured in a home-built interferometer 33 to be around 75 μm. To avoid sticking of PDMS onto the wafer during replication, the wafer was coated with (tridecafluoro)-1,1,2,2-tetrahydrooctyl) trichlorosilane (Gelest, Morrisville, PA, USA) by gas-phase deposition.…”
Section: Methodsmentioning
confidence: 99%
“…After curing, non-exposed SU-8 was dissolved in PGMEA and the wafer was cleaned with isopropyl alcohol and hard baked for 10 minutes at 155 °C. The height of the positive features in the master was measured in a home-built interferometer 33 to be around 75 μm. To avoid sticking of PDMS onto the wafer during replication, the wafer was coated with (tridecafluoro)-1,1,2,2-tetrahydrooctyl) trichlorosilane (Gelest, Morrisville, PA, USA) by gas-phase deposition.…”
Section: Methodsmentioning
confidence: 99%
“…After developing the photoresist, the wafers were etched to a depth of 61 m using a Bosche deep reactive ion etch process (Oxford Instruments ICP 380). The etch depth of 61 m was characterized using an optical profilometer (41). The wafers were diced and mounted in aluminum molds.…”
Section: Methodsmentioning
confidence: 99%
“…The main channel height was measured to be 25 ± 1 μm, and the chamber height was 104 ± 3 μm for the serpentine design and 113 ± 5 μm for the bifurcated design as determined by a custom-built white-light interferometer. 20 The serpentine device, used in single-cell experiments, contained 1020 chambers, while a bifurcated main channel device, used in dilution series experiments, contained 1024 channels. Details of the device dimensions and assembly are available as Figure S-2 and S-3 ( Supporting Information ).…”
Section: Methodsmentioning
confidence: 99%