A Readout System Design for LTCC-Based Piezoresistive Accelerometer

Abstract

This paper reports a readout system for a piezoresistive accelerometer which is fabricated by LTCC thick-film process technology. The authors first introduce a LTCC compatible design of this new kind of accelerometer, which is based on piezoresistive phenomenon. As the performance of the accelerometer circuitry is affected by temperature, a readout system is introduced for compensating the temperature drift and the non-linearity of this piezoresistive accelerometer by using the MAX1452 processor. The authors give the principles of the temperature compensation and the executive processes. The readout system also includes a ZigBee wireless transmission system and a real-time curve display window. Some tests on the system are carried out and the results manifest that the readout system designed in this paper is workable.