A Real-Time Detection Method For Wafer Probe Reference Die Shift

Zheng, Deguang; Lu, Kuan; Zhong, Bo; Liu, Shuxin; Liang, Xiaofeng

doi:10.1109/cstic58779.2023.10219387

2023 China Semiconductor Technology International Conference (CSTIC) 2023

DOI: 10.1109/cstic58779.2023.10219387

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A Real-Time Detection Method For Wafer Probe Reference Die Shift

Deguang Zheng,

Kuan Lu,

Bo Zhong

et al.

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A Real-Time Detection Method For Wafer Probe Reference Die Shift

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References 5 publications

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