A reliable fast miniaturized RF MEMS-on-CMOS switched capacitor with zero-level vacuum package

Riverola, M.; Uranga, A.; Torres, Francisco Torres; Barniol, N.; Marigo, E.; Soundara-Pandian, Mohanraj

doi:10.1109/imws-amp.2017.8247406

Cited by 7 publications

(2 citation statements)

References 13 publications

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“…Radio frequency microelectromechanical system (RF-MEMS) switches are aimed to perform the control function in tunable and reconfigurable RF/microwave and millimeter-wave (mmwave) systems. Electrostatic actuation is often preferred to other actuation mechanisms like electrothermal [1,2] and phase-change/phase-transition materials [3], due to its negligible current consumption, no requirement for external heating sources and integration capability with well-established technologies such as high-resistivity silicon [4][5][6][7], fused-quartz and glass substrates [8][9][10][11], or CMOS [12][13][14][15] and SiGe BiCMOS [16,17] processes. The latter can provide totally integrated, efficient systems containing sensors, control electronics, and MEMS-reconfigurable RF communication circuits [18].…”

Section: Introductionmentioning

confidence: 99%

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

Pradell¹,

Girbau²,

Ribó³

et al. 2018

MEMS Sensors - Design and Application

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Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconfigurable microwave and millimeter (mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch configurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, confirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconfigurable circuits, such as phase switches and filters, are developed with the proposed switch configurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.

show abstract

Section: Introductionmentioning

confidence: 99%

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

Pradell¹,

Girbau²,

Ribó³

et al. 2018

MEMS Sensors - Design and Application

View full text Add to dashboard Cite

show abstract

“…Radio frequency microelectromechanical system (RF-MEMS) switches are aimed to perform the control function in tunable and reconigurable RF/microwave and millimeter-wave (mmwave) systems. Electrostatic actuation is often preferred to other actuation mechanisms like electrothermal [1,2] and phase-change/phase-transition materials [3], due to its negligible current consumption, no requirement for external heating sources and integration capability with well-established technologies such as high-resistivity silicon [4][5][6][7], fused-quarz and glass substrates [8][9][10][11], or CMOS [12][13][14][15] and SiGe BiCMOS [16,17] processes. The later can provide totally integrated, eicient systems containing sensors, control electronics, and MEMS-reconigurable RF communication circuits [18].…”

Section: Introductionmentioning

confidence: 99%

MEMS Sensors - Design and Application

Yellampalli¹

2018

View full text Add to dashboard Cite

Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconigurable microwave and millimeter (mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch conigurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, conirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconigurable circuits, such as phase switches and ilters, are developed with the proposed switch conigurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.

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Designing of RF-MEMS Capacitive Contact Shunt Switch and Its Simulation for S-band Application

Sravani

Sai

Billscott

et al. 2021

Lecture Notes in Electrical Engineering

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A reliable fast miniaturized RF MEMS-on-CMOS switched capacitor with zero-level vacuum package

Cited by 7 publications

References 13 publications

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

MEMS Sensors - Design and Application

Designing of RF-MEMS Capacitive Contact Shunt Switch and Its Simulation for S-band Application

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