patients with tetraplegia [7-11] as well as to reveal the underlying neuroscience. [12-15] As the domain of bioelectronics has grown ever larger, the neural interfacing devices are required to have distinct prop erties and functions for specific uses. For a chronically implantable interface, the electrodes that are implanted in the brain continuously generate micromotions, and the mechanical mismatch between the rigid electrodes and the soft brain tissue causes foreign body responses. [16-20] Such immune responses degrade the signal quality and obstruct the usage of the device in a long term. Besides, for the electrodes monitoring brain activities on the surface of the brain, a proper contact between the electrodes and the folded brain surface is required to guarantee the signal quality, [21-23] which however is chal lenging to assure. Rigid materials, durable with conven tional silicon microfabrication technolo gies, were used in the earlier inventions of neural electrodes, [2,24,25] but the bio logical and mechanical mismatch between the rigid/stiff electrodes and soft tissues triggered the emer gence of soft interfaces. Soft materials, which are mechanically more compatible with tissues and conformable with curved sur faces, emerged as promising alternatives. Polymers including silicones with a low Young's modulus can reduce the imbalance in flexibility between the electrodes and the tissue. Polyimide, paryleneC, polydimethylsiloxane (PDMS), and SU8, with Young's moduli in MPa or GPa range, [26] are the representa tive polymeric substrates of soft neural electrodes. [27-34] As the cube of the substrate thickness is proportional to the bending stiffness, which is associated with the flexibility, ultrathin sheets of substrate can achieve even softer devices. [21,34-37] Bio degradable or bioresorbable materials have also been used as the substrate materials for shortterm implantation. [38-40] They have been proven to effectively reduce injury, which not only dissolves in the body over time but also eliminate the necessity for further surgery to remove the device when it is no longer in use. [39] Several interfaces utilized the biodegradable materials such as poly vinyl alcohol, polyethylene glycol, or silk to harden ultrathin devices instantly for implantation. [21,41,42] The Young's modulus of PDMS (1.32 MPa) is extremely low compared to that of polyimide, paryleneC, or SU8. [26] Neural interfaces play an essential role to disclose neural networks and to assist paralyzed patients in past decades. As the conformability and longevity become vital issues for neural interfaces, flexible materials are increasingly engaged in the development of such devices. However, the development of devices comprised of polydimethylsiloxane (PDMS) is bothered because of its incompatibility with silicon microfabrication technology, mainly caused by different thermal expansion coefficients between metals and PDMS. Here, a PDMS-based electrode array is developed through a single-wafer processing by employing an intermediate parylene-C...