A repetitively pulsed xenon chloride excimer laser with all ferrite magnetic cores (AFMC) based all solid state exciter

Benerji, N.S.; Varshnay, N; Ghodke, D. V.; Singh, Ashish

doi:10.1016/j.optlastec.2016.05.004

Cited by 2 publications

(3 citation statements)

References 26 publications

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“…Gas discharge pumping has revolutionized the development of excimer lasers, enabling pulse repetition rates of several kHz and pulse voltage rise times of less than 100 ns. These improvements are attributed to the recent use of allsolid-state power supplies with magnetic pulse compression (MPC) [12][13][14][15]. * Author to whom any correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

“…The simulation model is coupled to an MPC excitation circuit and a laser gain model. The MPC excitation circuit is simplified from an all-solid-state MPC power supply used for exciting repetitively pulsed XeCl laser [12], where a saturable magnetic switch is incorporated to isolate the MPC circuit during discharge. The influences of the peaking capacitor C p (terminal of the MPC circuit) on the electrical properties and input-output characteristics are explored.…”

Section: Introductionmentioning

confidence: 99%

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Effects of tunable circuit parameters on pulsed discharge and input-output characteristics of a XeCl excimer laser

Chen,

Zhao,

Liu

et al. 2024

J. Phys. D: Appl. Phys.

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High-pressure, pulsed discharge-pumped XeCl excimer lasers are operating in the ultraviolet range at a wavelength of 308 nm. In this paper, a one-dimensional fluid model coupled to a magnetic pulse compression (MPC) excitation circuit and a laser gain model is established for describing the discharge and laser output characteristics of XeCl excimer lasers. The effects of the peaking capacitor C p (the terminal of the MPC circuit) on the discharge properties and input-output characteristics are explored. The results reveal that C p plays a key role in suppressing discharge pulse oscillation, which in turn influences the peak value and duration of the laser pulse. By optimizing the capacitance, a maximum excimer formation efficiency of 6.6% and a maximum laser output efficiency of 5% (output energy of 1.26 J) are obtained when C p = 1.12 C s , where C s is the storage capacitor in the MPC circuit.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Effects of tunable circuit parameters on pulsed discharge and input-output characteristics of a XeCl excimer laser

Chen,

Zhao,

Liu

et al. 2024

J. Phys. D: Appl. Phys.

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“…The fluoride rare-gas excimer lasers own high output power, large pulse energy and short wave length, and have important application value and prospect in the fields such as semiconductor, photovoltaic, manufacture and medical [1][2][3][4] . However, the fluorine-containing discharge medium is strongly corrosive to materials [5] , which may lead to the deformation of the electrodes [6] , the reduction of the fluorine concentration, the generation of impurities and harmful gas [7] .…”

Section: Introductionmentioning

confidence: 99%

Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process

Guo

Ding

Zhou

et al. 2018

High Pow Laser Sci Eng

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The corrosion behaviors of the ArF excimer laser copper alloy electrodes were studied. The morphology, composition and impurities were characterized by optical microscope, scanning electron microscopy, electron microprobe and glow discharge mass spectrometer methods. The anode produces the reef, the corrosion pits, the hole layer and the $1{-}10~\unicode[STIX]{x03BC}\text{m}$ level flake impurity. The cathode produces the particles, the sputtering pits, the element reduce layer and the $1~\unicode[STIX]{x03BC}\text{m}$ level particle impurity. Besides the Cu element, other elements in the alloy participate in the corrosion: Al element in the reef is over 1.5 times of the anode, Zn element in the particles is 1.3 times of the cathode, many trace elements congregate on the copper surface several and even hundreds of times. These elements are responsible to a great degree for the impurities and the rapid energy decline of the long-time idled laser.

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A repetitively pulsed xenon chloride excimer laser with all ferrite magnetic cores (AFMC) based all solid state exciter

Cited by 2 publications

References 26 publications

Effects of tunable circuit parameters on pulsed discharge and input-output characteristics of a XeCl excimer laser

Effects of tunable circuit parameters on pulsed discharge and input-output characteristics of a XeCl excimer laser

Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process

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