A review of British work on microminiaturization techniques

Dummer, G.W.A.

doi:10.1016/0026-2714(62)90007-0

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Introduction 1general1

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1962

1971

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“…All the three main types of material-dielectrics, semiconductors and metallic conductors-have assumed considerable technological importance in thin-film form over the last decade and several texts have been published on the applications (Dummer 1962, Keonjian 1963, Holland 1966. There are also many articles, too numerous to list here, dealing with thin films and their circuit applications.…”

Section: Introduction 1generalmentioning

confidence: 99%

Electrical conduction in thin metallic, dielectric and metallic-dielectric films

Campbell¹,

Morley²

1971

Rep. Prog. Phys.

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Contents 1. Introduction . 1.1. General . 1.2. Structure . 2. Continuous metal films , 2.1. Introduction . 2.2. The theory of thin-film conduction in metals 2.3. Experimental measurements . 2.4. Practical applications . 3.1. Introduction . 3.2. D C conduction mechanisms . 3.3. Breakdown . 3.4. AC conduction mechanisms . 3.5. Temperature coefficient of capacitance 3.6. Preparation . 3.7. Applications . 4. Discontinuous metal films

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Section: Introduction 1generalmentioning

confidence: 99%