2011
DOI: 10.1016/j.diamond.2011.08.005
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A review of diamond synthesis by CVD processes

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Cited by 177 publications
(89 citation statements)
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“…Some of the notable diamond properties, such as high operating temperature and thermal conductivity at room temperature, wide optical transparency from the ultraviolet (UV) to the far infrared (IR), extreme mechanical hardness, high band gap (5.47 eV), among others, make it a material with great potential for application in many areas, particularly for semiconductor technology [1][2][3][4][5][6]. These properties have become better explored with the advent and improvement of Chemical Vapor Deposition (CVD) techniques, the main way of fabricating industrial diamond.…”
Section: Introductionmentioning
confidence: 99%
“…Some of the notable diamond properties, such as high operating temperature and thermal conductivity at room temperature, wide optical transparency from the ultraviolet (UV) to the far infrared (IR), extreme mechanical hardness, high band gap (5.47 eV), among others, make it a material with great potential for application in many areas, particularly for semiconductor technology [1][2][3][4][5][6]. These properties have become better explored with the advent and improvement of Chemical Vapor Deposition (CVD) techniques, the main way of fabricating industrial diamond.…”
Section: Introductionmentioning
confidence: 99%
“…Addition of O2 in a small amount (< 2%) is sometimes used in order to increase the etching effect and limit impurities incorporation or non-epitaxial defects formation [90,91]. In general, activation of the gas is performed through applying a 2.45 GHz MW field to a resonant cavity reactor (figure 3(a)) [92,93]. Operation under higher pressures (> 100 mbar) and microwave powers (> 2 kW) leads to the formation of a localized plasma region in the core of which temperatures may reach up to 3000 K which is favourable to produce precursors for growth [94].…”
Section: Cvd Grown Diamondsmentioning
confidence: 99%
“…Since the middle of the 1950s, the possibility was shown of growing diamonds using a wide variety of chemical vapor deposition (CVD) techniques [6][7][8][9][10][11]. Chemical vapor deposition (CVD) involves a series of gas phases and surface chemical reactions, along with the deposition of reaction products, i.e., diamond, on a solid substrate surface.…”
Section: Introductionmentioning
confidence: 99%